This article summarizes the most recent technological developments in the realization of integrated aluminum nitride (AlN) piezoelectric microelectromechanical system (MEMS) for radio frequency (rf) front ends to be employed in next generation wireless communication devices. The AlN-based resonator and switch technologies are presented, their principle of operation explained, and some key exper...

Piezoelectric nanomaterials are functional materials that hold a great promise for the nanoscale conversion of mechanical energy and electrical signals. Owing to their excellent electromechanical dependence, catalytic activity, response sensitivity, piezoelectric widely used in harvesting, sensors, actuators, resonators, medical detectors. Nano-piezoelectric exhibit unique chemical activities f...

We have designed and fabricated tunable gratings with period tunable to within fraction of a micrometer. We actuated the gratings by electrostatic and piezoelectric means, and demonstrated period changes of order 1nm. Introduction Optical MEMS devices have included micro-mirrors [1, 2], tunable gratings, tunable Fabry-Perot resonators, etc. For example, Silicon Light Machines has commercialized...

A fully-integrated lab-on-a-chip device for testing and monitoring biochemical parameters is described. The major innovation of this microdevice is the application of acoustic microagitation based on a β-PVDF piezoelectric polymer. The system parameters were optimized for an effective and rapid mixing.

Piezoelectrically actuated micromechanical resonators have been a subject of extensive research for the past decade with the main goal of replacing quartz resonators in timing applications. Aluminum nitride (AlN) has been the main contender as a piezoelectric ceramic replacement for quartz since its low-temperature sputtering process has been developed. In recent years, gallium nitride (GaN) ha...

The piezoelectric cold plasma generators (PCPG) allow for production of the direct discharge (PDD), which is a kind atmospheric pressure (APP). subjects this study are different arrays PCPGs large-area treatment planar substrates. Two limiting factors crucial design such arrays: (i) parasitic coupling between resulting in minimum allowed distance devices, and (ii) homogeneity large area treatme...