Micromanipulation is a key task to perform serial assembly of MEMS. The two-fingered microgrippers are usable but require specific studies to be able to work in the microworld. In this paper, we propose a new microgripping system where actuators and the end-effectors of the gripper are fabricated separately. End-effectors can thus be adapted to the manipulated micro-objects without new design a...

Thickness mode piezoelectric micro-electromechanical system (MEMS) ultrasound transducers, operating in the 50-75 MHz range, have been fabricated using a composite sol gel technique in combination with wet etching. The composite sol gel technique involves producing a PZT powder/sol composite slurry, which when spun down yields films a few micrometers thick. Repeated layering, and infiltration, ...

This review surveys micromachined gyroscope structure and circuitry technology. The principle of micromachined gyroscopes is first introduced. Then, different kinds of MEMS gyroscope structures, materials and fabrication technologies are illustrated. Micromachined gyroscopes are mainly categorized into micromachined vibrating gyroscopes (MVGs), piezoelectric vibrating gyroscopes (PVGs), surface...

The vibration analysis is an important step in the design and optimization of microsensors. In most of the cases, COMSOL software is employed to consider the size-dependency on the dynamic behavior in the MEMS sensors. In this paper, the Modified Couple Stress Theory (MCST) is used to capture the size effect on dynamic behavior in a microsensor with two layers of the silicon and piezoelectric. ...

Recently, flapping robots are noticed by many researchers, and many challenges are being made toward the realization of flight motions like insects, birds and so on. The purpose of this work is to develop flapping robots using a new type of piezoelectric material, that is, piezoelectric fiber composites. By using the composites, actuating fibers and sensing fibers can be embedded into a wing as...

and Introduction: Thin-film piezoelectric micro-robots could potentially help save human lives with their ability to do reconnaissance in hazardous places, or help avoid costly demolition processes during infrastructure maintenance by utilizing images provided from inconvenient and/or unreachable locations. In order to achieve these goals, there should be an optimized fabrication process for th...

The purpose of this work is to present recent advances in modeling and design of piezoelectric energy harvesters, in the framework of micro-electro-mechanical systems (MEMS). More specifically, the case of inertial energy harvesting is considered, in the sense that the kinetic energy due to environmental vibration is transformed into electrical energy by means of piezoelectric transduction. The...

abstract introduction: nowadays, the advanced technology of designing electronic circuits in very small size and with very low power consumption has led to development of wearable and implantable medical devices. however, the electronic circuits need power supply that is usually provided by relatively large and heavy batteries. the discharged batteries have to replaced or recharged for long tim...

The localized coupling between piezoelectric and photoexcitation effects of a ZnO micro/nanowire device has been studied for the first time with the goal of designing and controlling the electrical transport characteristics of the device. The piezoelectric effect tends to raise the height of the local Schottky barrier (SB) at the metal-ZnO contact, while photoexcitation using a light that has e...

Piezoelectric ultrasonic motors are superior to electromagnetic micro motors, because their efficiency remains theoretically constant during miniaturization. However, the still relatively recent technology has a considerable unexploited optimization potential. Numerical structural analysis by the means of the finite element method (FEM) is a common approach for dimensioning piezoelectric motors...