2 A process to fabricate functional polysilicon structures above large (43 4 mm ) thin (200 nm), very flat LPCVD silicon rich nitride membranes was developed. Key features of this fabrication process are the use of low-stress LPCVD silicon nitride, sacrificial layer etching, and minimization of membrane stress and deformation after fabrication, which was done by complete removal of the sacrific...

Titanium-silicon alloys have been electrochemically extracted from the multi-component titanium compounds in molten calcium chloride electrolyte. Sintered pressed pellets of titanium-bearing compounds served as the cathode, and the electrochemical experiments were systematically carried out at 900 °C, 3.1 V and 1000 °C, 3.8 V using a graphite-based anode and an improved inert-oxygen-ion-conduct...

This paper presents a novel dosing concept for drug delivery based on a peristaltic piezo-electrically actuated micro membrane pump. The design of the silicon micropump itself is straight-forward, using two piezoelectrically actuated membrane valves as inlet and outlet, and a pump chamber with a piezoelectrically actuated pump membrane in-between. To achieve a precise dosing, this micropump is ...

Concerns over possible toxicities of conventional metal-containing quantum dots have inspired growing research interests in colloidal silicon nanocrystals (SiNCs), or silicon quantum dots (SiQDs). This is related to their potential applications in a number of fields such as solar cells, optoelectronic devices and fluorescent bio-labelling agents. The past decade has seen significant progress in...

A key to the development of lipid membrane-based devices is a fundamental understanding how molecular structure bilayer membrane influenced by type lipids used build membrane. This particularly important when proteins are included in these since precise environment affects ability incorporate and their functionality. Here, we neutron reflectometry investigate tethered membranes characterize inc...