Recently, there is great interest in monolithically integrated free-space micro-optics using micromachining techniques [ 11. Monolithic integration of the whole micro-optical system can drastically reduce its size, weight, and cost. In addition, the expensive packaging process of individual optical elements can also be eliminated. An example of the newly micromachined integrated micro-optical s...

Bell-shaped vibratory angular rate gyro (abbreviated as BVG) is a new type Coriolis vibratory gyro that was inspired by Chinese traditional clocks. The resonator fuses based on a variable thickness axisymmetric multicurved surface shell. Its characteristics can directly influence the performance of BVG. The BVG structure not only has capabilities of bearing high overload, high impact and, compa...

Gyroscopes are instruments capable of sensing changes in their inertial orientation. A gyroscope has one or more sensitive axis and can measure a rotation around them. They are usually mechanical devices that employ a rapid spinning mass to detect the inertial variations. Satellites usually have gyroscopes in the Attitude and Orbit Control System as attitude (orientation) sensors that measure a...

Creating an autonomous flying vehicle the size of a honeybee presents a number of technical challenges because of its small scale. As vehicle wingspan diminishes, angular acceleration rates increase, necessitating sensing and control systems with high bandwidth. Hovering demonstrations have so far required feedback from highspeed motion capture cameras to estimate the angular velocity, attitude...

This paper presents a theoretical analysis of mechanical and electrical noise in the sense channel of micro-electromechanical systems (MEMS) vibratory gyroscopes. Closed-form expressions for the power spectral density (PSD) of the noise equivalent rate (NER) of gyroscopes in the open-loop and the force-rebalance operations are derived by using an averaged PSD model and an equivalent transfer fu...

The time-average method currently available is limited to analyzing the specific performance of the automatic gain control-proportional and integral (AGC-PI) based velocity-controlled closed-loop in a micro-electro-mechanical systems (MEMS) vibratory gyroscope, since it is hard to solve nonlinear functions in the time domain when the control loop reaches to 3rd order. In this paper, we propose ...

This paper presents a control strategy for micro-electro-mechanical systems (MEMS) z-axis gyroscope, based on the coupling of the fuzzy logic control with the so-called sliding mode control (SMC) approach and sliding mode observer. An adaptive model reference state tracking controller which can estimate the angular velocity vector, and the damping and stiffness model coefficients in real-time i...