This study observes that copper (Cu) films deposited by high current densities or in an aged electrolyte easily generate void defects after chemical mechanical polishing (CMP). The (111)/(200) ratio and the impurity amount of an electroplated Cu film are found to have strong correlation with the formation of void defects. Furthermore, pulse-reverse waveform plating following direct current plat...

The microelectronics industry is focused on increasing chip complexity, improving the density of electron carriers, and decreasing the dimensions of the interconnects into the sub-0.25 mum regime while maintaining high aspect ratios. Water-based chemical mechanical planarization or polishing (CMP) faces several technical and environmental challenges. Condensed CO2 has significant potential for ...

Along with the remarkable growth in complexity of semiconductor fabrication technology, chemical mechanical planarization (CMP) has evolved and become progressively more sophisticated over years, enabling implementation novel integration schemes. This paper discusses current research development trends one specific aspect CMP namely, ceria particle usage for advanced technology nodes provides s...

Pattern-based signal/noise separation is a common technique to suppress multiples. It can be formulated in the t x domain using non-stationary Prediction Error Filters (PEF). One can obtain a kinematically correct model of the multiples by downward continuation. The CMP gather and the corresponding multiple estimate are characterized by a space varying PEF. After applying a simple separation te...

In this paper, we propose an analytical model-based study to investigate how hardware prefetching and memory bandwidth partitioning impact Chip Multi-Processors (CMP) system performance and how they interact. The model includes a composite prefetching metric that can help determine under which conditions prefetching can improve system performance, a bandwidth partitioning model that takes into ...

Single-core performance increases have stalled. To increase available cycles, microprocessor designers have shifted to chip-multiprocessor (CMP) designs. Unfortunately, the additional processors provided by CMPs may remain idle because most applications lack dataparallelism and task-parallelism is unlikely to saturate future CMP designs. The systems community needs to rethink how systems are st...

Single-core performance increases have stalled. To increase available cycles, microprocessor designers have shifted to chip-multiprocessor (CMP) designs. Unfortunately, the additional processors provided by CMPs may remain idle because most applications lack dataparallelism and task-parallelism is unlikely to saturate future CMP designs. The systems community needs to rethink how systems are st...

Methods We used Markov transition models to compare the expected lifetime gain in quality-adjusted life years (QALYs) of OIT to CMP versus strict avoidance of CMP. Models were run for base cases of 6to 16-yearold children with CMA requiring strict CMP avoidance. Rates of transition to the partial or full desensitization and complete tolerance states, utilities for each state, and disutilities a...

The Chip Multiprocessor (CMP) architecture offers dramatically faster retrieval of shared data which is cached on-chip rather than in an off-chip memory. Remote cache requests are handled through a cache coherence protocol. In order to obtain the best possible performance with the CMP architecture, the cache coherence protocol must be optimized to reduce time lost during remote cache and offchi...