UNLABELLED The utility of micro-electro-mechanical sensors (MEMS) for application in air-coupled (contactless or noncontact) sensing to concrete nondestructive testing (NDT) is studied in this paper. The fundamental operation and characteristics of MEMS are first described. Then application of MEMS sensors toward established concrete test methods, including vibration resonance, impact-echo, ult...

<p>Cleanroom parameters such as temperature, relative humidity and particle count are vital in maintaining cleanliness. People machines working inside the cleanroom main contributors for sudden changes of separameters. Measurements monitoring these therefore necessary to reduce rejects downtime production micro-electro-mechanical systems (MEMS). This paper presents a method developmentof ...

This research aims at enhancing the accuracy of land vehicular navigation systems by integrating GPS and Micro-Electro-Mechanical-System (MEMS) based inertial measurement units (IMU). This comprises improving the MEMS-based inertial output signals as well as investigating the limitations of a conventional Kalman Filtering (KF) solution for MEMS-IMU/GPS integration. These limitations are due to ...

Although GPS measurements are the essential information for currently developed land vehicle navigation systems (LVNS), the situation when GPS signals are unavailable or unreliable due to signal blockages must be compensated to provide continuous navigation solutions. In order to overcome the unavailability or unreliability problem in satellite based navigation systems and also to be cost effec...

Given the multiple applications for micro-electro-mechanical system (MEMS) mirror devices, most of the research efforts are focused on improving device performance in terms of tilting angles, speed, and their integration into larger arrays or systems. The modeling of these devices is crucial for enabling a platform, in particular, by allowing for the future control of such devices. In this pape...

The micro-electro-mechanical systems (MEMS)-based sensor technologies are considered to be the enabling factor for future development of smart sensing applications, mainly due their small size, low power consumption and relatively cost. This paper presents a new structurally thermally stable design resonant mode-matched electrostatic z-axis MEMS gyroscope considering foundry constraints cost co...

Metamaterials, materials that are constructed with arrays of small elements have significant potential to provide material properties that are useful for electromagnetic applications but are not found in nature. Slight changes to a repeated unit cell can be used to tune the effective bulk material properties of a metamaterial, replacing the need to discover suitable materials for an application...

We present a single crystalline silicon optical phased array using high-contrast-gratings (HCG) for fast two dimensional beamforming and beamsteering at 0.5 MHz. Since there are various applications for beamforming and beamsteering such as 3D imaging, optical communications, and light detection and ranging (LIDAR), it is great interest to develop ultrafast optical phased arrays. However, the be...

Scanning probe microscopy is a frequently used nanometer-scale surface investigation technique. Unfortunately, its applicability is limited by the relatively low image acquisition speed, typically seconds to minutes per image. Higher imaging speeds are desirable for rapid inspection of samples and for the study of a range of dynamic surface processes, such as catalysis and crystal growth. We ha...