Based on last years field emission (FE) results achieved with randomly distributed free-standing gold nanowires (NW) [1], cathodes with regular arrays of Au-NW patches (50 μm diameter) were fabricated by means of a shadow mask during heavy ion irradiation of polycarbonate foils [2-3]. The number density, diameter Ø, and length L of the NW were controlled by the ion fluence f, foil etching time,...

Micro power sources are required to be used in autonomous microelectromechanical system (MEMS). In this paper, we designed and fabricated a three dimensional (3D) MEMS supercapacitor, which is consisting of conformal silicon dioxide/titanium/polypyrrole (PPy) layers on silicon substrate. At first, through-structure was fabricated on the silicon substrate by high-aspect-ratio deep reactive ion e...

Porous CdSe layers have been produced by anodic etching of crystalline substrates in a HCl solution. Anodization under in situ UV illumination resulted in the formation of uniformly distributed parallel pores with a diameter of 30 nm, stretching perpendicularly to the initial surface. At the same time, pronounced nonuniformities in the spatial distribution of pores were evidenced in samples sub...

Surface chemistry studies of the chemical mechanical planarization ~CMP! of copper are presented in this paper. Blanket copper samples were polished with an acidic alumina-based slurry which contains an organic acid salt ~phthalic acid salt! and an oxidizer (H2O2!. Surface studies using X-ray photoelectron spectroscopy ~XPS! were performed on copper samples after chemical etching or CMP in orde...

Track-etched membranes are polymer foils irradiated with swift heavy ions and subsequently wet-etched to create pores by dissolving defects formed along the ion trajectories. Under suitable conditions, the resulting pores are of cylindrical shape and uniform in size. Such membranes are commonly used for filtration or as templates for nanowires, grown inside the pores, e.g., by electrochemical d...

We describe the fabrication, simulation, and measurement of a terahertz (THz) filter composed of nanoporous silicon multilayers. Using electrochemical etching, we fabricated a structure composed of alternating high- and low-index layers that achieves 93% power reflectivity at the target wavelength of 1.17 THz, with a stopband of 0.26 THz. The measured reflection and transmission spectra of the ...

This study introduces two new processes that highly enable PEDOT:PSS (poly(3,4-ethylenedioxythiophene)-poly(styrenesulfonate)) as stable coating material for chronic neural stimulation. In first process, strong mechanical bonding between PEDOT:PSS coating and gold electrodes is achieved by creating rough porous surface with partial iodine etching. PEDOT:PSS coating on iodine etched gold electro...

Practical application of superhydrophobic surfaces is limited by the fragility of nanoscale asperities. Combining chemical etching and anodization, microscale pits and nanoscale pores, instead of the micro and nano protrusions on traditional superhydrophobic surfaces mimicking Lutos leaves, were fabricated on commercially pure aluminum surfaces. After modified by FDTS, the surfaces were superhy...

N-type macroporous silicon microcavity structures were prepared using electrochemical etching in an HF solution in the absence of light and oxidants. The CdSe/ZnS water-soluble quantum dot-labeled DNA target molecules were detected by monitoring the microcavity reflectance spectrum, which was characterized by the reflectance spectrum defect state position shift resulting from changes to the str...

We demonstrate wavelength-tunable, air-stable and nontoxic phosphor materials based on silicon quantum dots (SiQDs). The phosphors, which are composed of micrometer-size silicon particles with attached SiQDs, are synthesized by an electrochemical etching method under ambient conditions. The photoluminescence (PL) peak wavelength can be controlled by the SiQD size due to quantum confinement effe...