نتایج جستجو برای: lpcvd
تعداد نتایج: 265 فیلتر نتایج به سال:
The growth of large-area bilayer graphene has been of technological importance for graphene electronics. The successful application of graphene bilayers critically relies on the precise control of the stacking orientation, which determines both electronic and vibrational properties of the bilayer system. Toward this goal, an effective characterization method is critically needed to allow resear...
This paper compares the use of four mechanical methods for characterization of residual stress variation in low pressure chemical vapor deposited (LPCVD) polysilicon thin films deposited, doped, and annealed under different conditions. Stress was determined using buckling structures, vibrating microstructures, static rotating structures and the wafer curvature method. After deposition of 1.0 μm...
gas sensitive metal oxide layers used in fabrication of resistive gas sensors are prepared by different deposition techniques. the technical data reported on some basic and practically important specifications of these devices, although fabricated based on the same gas sensitive oxide, are anomalously different. the influence of the fabrication technique used for the deposition of the gas sensi...
Passivating contacts are crucial for realizing high-performance crystalline silicon solar cells. In this study, we focused on contact formation by plasma-enhanced chemical vapor deposition (PECVD) followed an annealing step. We manufactured poly-SiO x passivating combining plasma-assisted N2O-based oxidation of (PANO-SiO ) with a thin film phosphorus (n+) or boron (p+) doped hydrogenated amorph...
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