This paper reports on design, fabrication and characterization of high-Q MEMS resonators to be used in optical applications like laser displays and LIDAR range sensors. Stacked vertical comb drives for electrostatic actuation of single-axis scanners and biaxial MEMS mirrors were realized in a dual layer polysilicon SOI process. High Q-factors up to 145,000 have been achieved applying wafer leve...

A review of radio frequency microelectromechanical systems (RF MEMS) technology, from the perspective of its enabling technologies (e.g. fabrication, RF micromachined components and actuation mechanisms) is presented. A unique roadmap is given that shows how enabling technologies, RF MEMS components, RF MEMS circuits and RF microsystems packaging are linked together; leading towards enhanced in...

This chapter presents a brief overview of some of the major research contributions in the area of VLSI computing with optical interconnects since the early modelings of the 1980s to today’s MEMS implementations. Both free-space and fiber-guided interconnects are covered. Various models and architectures with optical interconnects are shown, and aspects of their algorithmic design are also revie...