MEMS thermal actuators have been employed in a broad range of applications, often operating in different environments (e.g. vacuum, air or liquid). Since the involved heat dissipation mechanisms are different in different operating environments, the device performances are expected to be different. In this paper, we report experimental measurement and multiphysics modeling of device performance...

The DOA (direction of arrival) estimation of seismic signals from the moving target on the ground bears great significance for unattended ground systems. The traditional DOA estimation of seismic signals is achieved by a sensor array and its corresponding algorithms. MEMS (Micro-ElectroMechanical Systems) vector vibration sensor, however, gets the vector information over the propagation of seis...

The location of objects is a growing research topic due, for instance, to the expansion of civil drones or intelligent vehicles. This expansion was made possible through the development of microelectromechanical systems (MEMS), inexpensive and miniaturized inertial sensors. In this context, this article describes the development of a new simulator which generates sensor measurements, giving a s...

An in situ measurement of micro-friction torque in MEMS gas bearings, which has been a challenging research topic for years, is realized by a system designed in this paper. In the system, a high accuracy micro-force sensor and an electronically-driven table are designed, fabricated and utilized. With appropriate installation of the sensor and bearings on the table, the engine rotor can be drive...

A three-axis piezoresistive accelerometer which has adjustable resolutions to three axes was developed using MicroElectroMechanical Systems (MEMS) technology. This sensor made of a heavy proof mass and four long beams is to obtain high resolutions by reducing resonance frequencies. Adjustable resolution with small cross axis sensitivity could be obtained by a three-dimensional sensor structure.

The application of sensors encompasses many sectors of industry. In this paper, we outline different sensors – Raman distributed temperature sensor, sensor based on nano ferrofluids and MEMS based ultrasonic sensors. The development and application of these sensors for monitoring performance of systems and processes are discussed. Further, we also discuss the application of acoustic emission an...

This manuscript reports on the development of a needle-type sensor for in situ on-site measurement of pH. Conventional pH microelectrode sensors are fabricated by pulling glass pipettes and applying ion-selective films at the tip. However, these sensors suffer from low fabrication yields and short sensor lifetime due to disruption or loss of the ion-selective membrane after repeated use. The de...

This project maps the distributed feedback loops of biological photoreceptors to silicon to create low-power high-performance silicon photoreceptors. Such photoreceptors are useful as front ends in VLSI motion sensors, important in robotic and active-vision applications. An ultra-low-noise MEMS vibration sensor, which provides inertial information to a vibrating visual sensor being built by col...

This paper proposes the result of hardware in the loop simulation (HILS) for performance evaluation about a small attitude heading reference system (AHRS) based micro electro mechanical system (MEMS) suitable for small unmanned underwater vehicle. Unmanned underwater vehicles (UUV) have many applications in scientific, military, and commercial area due to its autonomy and the navigation system ...