Cantilever magnetometry is a measurement technique used to study magnetic nanoparticles. With decreasing sample size, the signal strength is significantly reduced, requiring advances of the technique. Ultrathin and slender cantilevers can address this challenge but lead to increased complexity of detection. We present an approach based on the co-resonant coupling of a micro- and a nanometer-siz...

Atomic Force Microscopy (AFM) is a near-field technique to generate high-resolution images of surfaces. A micro-fabricated elastic beam with an integrated sharp sensor tip at its end is scanned over the sample surface. With various dynamic modes, leading to Force Modulation Microscopy [1], Ultrasonic Force Microscopy [2], Atomic Force Acoustic Microscopy (AFAM) [3–5], Microdeformation Microscop...

The internal jaw stiffness of the silicon arm and its uniformity directly determine geometric position clamped part, which in turn affects accuracy fusion target ball. slight variation caused by machining errors is a crucial factor affecting micro-target. To accurately detect errors, this paper proposes multi-point detection method combining micro-feed force application high-precision image ins...

Here we describe the application of a recently developed high-resolution microcantilever biosensor resonating at the air-liquid interface for the continuous detection of antigen-antibody and enzyme-substrate interactions. The cantilever at the air-liquid interface demonstrated 50% higher quality factor and a 5.7-fold increase in signal-to-noise-ratio (SNR) compared with one immersed in the puri...

INTRODUCTION: Micro Electro Mechanical Systems (MEMS) are fabricated with an in-plane fabrication technology. Out-of-plane structures can be designed to be assembled to provide thermal and electrical isolation from the substrate [1 -3]. These isolations can potentially improve the performance of a range of MEMS devices by decreasing any unwanted coupling effects or parasitic losses from the dev...

In this article, in reference to the modified couple stress theory and Euler-Bernoulli beam theory, the free lateral vibration response of a micro-beam carrying a moveable attached mass is investigated. This is a decent model for biological and biomedical applications beneficial to the early-stage diagnosis of diseases and malfunctions of human body organs and enzymes. The micro-cantilever beam...