In this work, the effects of N2 addition to SF6 plasma used in isotropic silicon etching Micro-electromechanical systems (MEMS) with Au components are investigated. A four-variables Doehlert design was implemented for optimizing parameters (power, pressure, gas flow rate, and N2/SF6 ratio) maximize lateral etch rate Si using SF6/N2 mixture. The optimized condition founded a 1.8 µm/min was: powe...

The rapid aging of the world’s population, along with an increase in the prevalence of chronic illnesses, requires adaption and modification of current healthcare models. New trends on healthcare technologies fall into the use of autonomous systems that allows the capturing and monitoring of physiological parameters anytime and anywhere. One approach involves tele-health applications, many of w...

Applications of microfluidics and MEMS (micro-electromechanical systems) technology are emerging in many areas of biological and life sciences. Non-contact microdispensing systems for accurate, high-throughput deposition of bioactive fluids can be an enabling technology for these applications. In addition to bioactive fluid dispensing, ink-jet based microdispensing allows integration of feature...

This research aims at enhancing the accuracy of navigation systems by integrating GPS and Micro-ElectroMechanical-System (MEMS) based inertial measurement units (IMU). Because of the conditions required by the large number of restrictions on empirical data, a conventional Extended Kalman Filtering (EKF) is limited to apply in navigation systems by integrating MEMS-IMU/GPS. In response to non-li...

Nanocomposites of diphenylalanine (FF) and carbon based materials provide an opportunity to overcome drawbacks associated with using FF micro- and nanostructures in nanobiotechnology applications, in particular their poor structural stability in liquid solutions. In this study, FF/graphene oxide (GO) composites were found to self-assemble into layered micro- and nanostructures, which exhibited ...

We present a steerable, electrostatic, untethered, MEMS micro-robot, with dimensions of 60 /j.m by 250 /j.m by 10 /j.m. This micro-robot is 1 to 2 orders of magnitude smaller in size than previous micro-robotic systems. The device consists of a curved, cantilevered steering arm, mounted on an untethered scratch drive actuator. These two components are fabricated monolithically from the same she...

* Instituto Superior Técnico, DEEC/SMEEP CAUTL-Lab. de Mecatrónica, Av. Rovisco Pais 1, 1096 Lisboa Codex, Portugal. phone: 351-1-8417432 fax: 351-1-8417167 http://rorty.ist.utl.pt/pbranco E-Mail: [email protected] + Escola Superior de Tecnologia, Instituto Politécnico de Setúbal, Rua do Vale de Chaves, Estefanilha 2910 Setúbal, Portugal. phone: 351-65-761621. fax: 351-65-721869 E-Mail: j...

Devices such as sensors, actuators, or micro-electromechanical systems (MEMS) are obtained by a variety of microfabrication processes. Many these processes influence the material introduction strain and defects, which may affect final device's performance reliability. Indeed, controlling materials' status during is fundamental for process optimization itself guaranteeing highest devices perform...

to study the effect of different fertilizing systems on macro and micro nutrients uptake by annual medic (medicago scutellata cv. robinson) an experiment was conducted under dry farming and irrigated conditions at two research stations (sararood dryland agricultural research institute and soil fertility research station in mahidasht) during 2009 growing season. the experimental treatments consi...