We have developed a simple method adopting double-patterning technique to extend the I-line stepper limit for the sub-100 nm poly-Si pattern generation in this work. Through in-line and cross-sectional scanned electron microscopic analyses of the generated patterns, we confirmed the feasibility of the double-patterning technique for the fabrication of nano-scale devices. Resolution capability o...

The Scanning Probe Microscopes (SPMs) based lithographic techniques have been demonstrated as an extremely capable patterning tool. Manipulating surfaces, creating atomic assembly, fabricating chemical patterns, imaging topography and characterizing various mechanical properties of materials in nanometer regime are enabled by this technique. In this paper, a qualified overview of diverse lithog...

We demonstrate nano-fabrication of high-aspect ratio and high-spatial frequency diffractive X-ray optics with high uniformity for use in a laser-plasma-based compact water-window X-ray microscope. The structures are fabricated on 50 nm thin Si3N4-membranes using a three-layer resist scheme and 30 keV e-beam lithography in combination with reactive ion etching and nickel electroplating. The proc...

DPNTM is a versatile technology that leverages Scanning Probe Microscopy for applications in biotechnology, photomask repair, molecular-electronics, nano-electronics and mask-less lithography. The DPN process was augmented for biotechnology applications (genomics, proteomics) through the design, development, prototype fabrication, testing and manufacture of commercial microfluidic systems calle...

We review past and recent progress in Nano-Imprint Lithography (NIL) methods to (nano-) structure inorganic materials from sol-gel liquid formulations colloidal suspensions onto a surface. This technique, first inspired by embossing techniques, was developed for soft polymer processing, as final or intermediate materials, but is today fully adapted hard with high dielectric constant, such metal...

Scientific research in plasmonic metasurfaces has been widely widespread the last years, motivated by recent advances nanofabrication field and increasing demand for high throughput sensing platforms. The electronics, microfluidics, signal processing have enabled complete development of highly integrated devices with broad application potential. However, progress observed from a fabrication poi...

Biomimetic micro- and nano- structures have attracted considerable interest over the last decades for various applications ranging from optics to life sciences. The complex nature of structures, however, presents significant challenges fabrication their application in real-life settings. Nanoimprint lithography could provide an interesting opportunity this respect. This article seeks overview w...

Transition metal dichalcogenides (TMDs) like molybdenum disulfide (MoS2) have unique optical properties such as strong luminescence and a tunable bandgap. However, the small interaction distance due to atomically thin nature of these materials is limitation for applications. In this study, significant enhancement A- B-exciton emission in MoS2 flakes through coupling with plasmonic Au nano-pyram...