In situ pyroelectric calorimetry and spectroscopic ellipsometry were used to investigate surface reactions in atomic layer deposition (ALD) of zirconium oxide (ZrO2). Calibrated time-resolved ALD provides new insights into the thermodynamics kinetics saturating for tetrakis(dimethylamino)zirconium(IV) (TDMAZr) water. The net reaction heat ranged from 0.197 mJ cm−2 at 76 °C 0.155 158 °C, corresp...

The crystal structure of zirconium oxide nanoparticles was refined by the Rietveld analysis of synchrotron X-ray powder diffraction data measured at 298 K. In the nanoparticles, two phases of tetragonal ZrO(2 - delta) (average particle size: 11 +/- 2 nm) and monoclinic ZrO2 (average particle size: 24 +/- 4 nm) existed, where the weight fractions were estimated to be 84.9 and 15.1 wt%, respectiv...

A thorough comparison between the slowly and fast cooled ß”-type oxynitrides of zirconium has been carried out by means of transmission electron microscopy. This work aims at detecting and analyzing the so-called “modulated” β’’ phase, which has been involved in the introduction of ordered anion vacancies through nitridation of zirconia. The gained information from the occurrence of such a modu...

Methyl triflate reacts with the metastable azoxymetallacyclopentene complex Cp*2Zr(N(O)NCPhCPh), generated in situ from nitrous oxide insertion into the Zr-C bond of Cp*2Zr(η2-PhCCPh) at -78 °C, to afford the salt [Cp*2Zr(N(O)N(Me)CPhCPh)][O3SCF3] (1) in 48% isolated yield. A single-crystal X-ray structure of 1 features a planar azoxymetallacycle with methyl alkylation taking place only at the ...

Titanosilicalite-1 (TS-1) in combination with sulfated zirconia efficiently catalyzes the epoxidation of 1-octene with aqueous hydrogen peroxide. The presence of both octahedral zirconium and sulfate species in the catalysts enhances the epoxidation rates.

The dielectric properties of ZrO2–Al2O3 nanolaminates, deposited via atomic layer deposition, and their impact on the performance and stability of indium gallium zinc oxide and zinc tin oxide amorphous oxide semiconductor thin-film transistors TFTs are investigated. It is found that nanolaminate dielectrics can combine the advantages of constituent dielectrics and produce TFTs with improved per...

A novel method of preparing thermally stable zirconia-based mesoporous materials was developed. The zirconia-based mesoporous materials of 2D-hexagonal structure were prepared using zirconium sulfate as the zirconium precursor and cetyltrimethylammonium (CTMA) as the pore-directing agent with the aid of salt in the synthesis solution to reduce the sulfate content in the final product and signif...

Thin-film transistors (TFTs) with zirconium-doped indium oxide (ZrInO) semiconductor were successfully fabricated by an all-DC-sputtering method at room temperature. The ZrInO TFT without any intentionally annealing steps exhibited a high saturation mobility of 25.1 cm(2)V(-1)s(-1). The threshold voltage shift was only 0.35 V for the ZrInO TFT under positive gate bias stress for 1 hour. Detaile...

approved: enri J.F. Jansen Molecular dynamics is a technique in which the trajectories of a group of particles are calculated as a function of time by integrating the equations of motion. In this thesis we study the use of molecular dynamics for atoms in a crystal. A model is introduced which describes interactions of a physical system with an external heat reservoir in molecular dynamics simul...

A novel compensation method for Zirconium dioxide gated Ion Sensitive Field Effect Transistors (ISFETs) to improve pH-dependent drift was demonstrated. Through the sequential measurements for both the n-channel and p-channel ISFETs, 75-100% pH-dependent drift could be successfully suppressed for the first seven hours. As a result, a nearly constant drift rate versus pH value was obtained, which...