Saravana Guru Mariappan 1,2, Ali Moazenzadeh 1,2 and Ulrike Wallrabe 1,* 1 Laboratory for Microactuators, Department of Microsystems Engineering (IMTEK), University of Freiburg, Georges-Koehler-Allee 102, 79110 Freiburg, Germany; [email protected] (S.G.M.); [email protected] (A.M.) 2 Voxalytic GmbH, Rosengarten 3, 76228 Karlsruhe, Germany * Correspondence: wallrabe@imtek....
