For cleaning silicon wafers via the RCA clean, temperature control is important for stable cleaning performance, but difficult owing that the RCA solutions expose nonlinear and time-varying exothermic chemical reactions. So far, the MSPC (model switching predictive controller) using the CAN2 has been developed and the effectiveness has been validated, where however we have observed that the con...

A combined wet and dry cleaning process for GaN(0001) has been investigated with XPS and DFT-MD modeling to determine the molecular-level mechanisms for cleaning and the subsequent nucleation of gate oxide atomic layer deposition (ALD). In situ XPS studies show that for the wet sulfur treatment on GaN(0001), sulfur desorbs at room temperature in vacuum prior to gate oxide deposition. Angle reso...

Highly uniform hole spacing micro brushes were fabricated based on aligned carbon nanotube (CNT) arrays synthesized by chemical vapor deposition method with the assistance of anodic aluminum oxide (AAO) template. Different micro brushes from CNT arrays were constructed on silicon, glass, and polyimide substrates, respectively. The micro brushes had highly uniform hole spacing originating from t...

Alkyl derivatives of MEA are used in the production of surfactants, dyes, in the manufacture of drugs as a buffer substance and for the stabilization of emulsions, in the manufacture of herbicides, cosmetics, antihistamines, are also of practical interest [1]. It is widely known also as useful “acid” gases (H2S, CO2, SO2, etc.) as absorbents in the process of cleaning process for gases in oil r...

Alkyl derivatives of MEA are used in the production of surfactants, dyes, in the manufacture of drugs as a buffer substance and for the stabilization of emulsions, in the manufacture of herbicides, cosmetics, antihistamines, are also of practical interest [1]. It is widely known also as useful “acid” gases (H2S, CO2, SO2, etc.) as absorbents in the process of cleaning process for gases in oil r...

This paper brings together over 250 published and unpublished studies on the environmental properties, fate, and toxicity of the four major, high-volume surfactant classes and relevant feedstocks. The surfactants and feedstocks covered include alcohol sulfate or alcohol sulfate (AS), alcohol ethoxysulfate (AES), linear alkylbenzene sulfonate (LAS), alcohol ethoxylate (AE), and long-chain alcoho...

BACKGROUND Cleaning of environmental surfaces in hospitals is important for the control of methicillin-resistant Staphylococcus aureus (MRSA) and other hospital-acquired infections transmitted by the contact route. Guidance regarding the best approaches for cleaning, however, is limited. METHODS In this study, a mathematical model based on ordinary differential equations was constructed to st...