Lithography, the fundamental fabrication process of semiconductor devices, is playing a critical role nowadays in the fabrication of microand nano-structures especially for the realization of micro-electro-mechanical systems (MEMS), microfluidic devices, photonic crystals, photonic integrated circuits, micro-optics, and plasmonic optoelectronic devices. These devices have various practical appl...

This paper reports on the design of a novel ultra low actuation voltage, low loss radio frequency micro-electro-mechanical system (RF MEMS) capacitive shunt switch. The concept of the switch relies on a mechanically unconstrained armature actuated over a coplanar waveguide using electrostatic forces. The minimum actuation voltage of the switch is <2V, with an isolation of 40dB and insertion los...

In this paper we study the use of pseudorandom test techniques for linear and nonlinear devices, in particular Micro Electro Mechanical Systems (MEMS). These test techniques lead to practical BuiltIn-Self-Test techniques (BIST). We will first present the pseudorandom test technique for Linear Time Invariant (LTI) systems. Next, we will illustrate and evaluate the application of these techniques...

This research established the design guidelines for center embossed diaphragms for micro-diaphragm fiber type sensors. Following the guidelines, a center embossed diaphragm fiber optic sensor (CE-DFOS) based on Fabry–Perot interference was designed and fabricated with micro-electro-mechanical system (MEMS) technology. The CE-DFOS was experimentally verified to have the designed intrinsic freque...

We report a new approach for efficient computation of capacitance in multiconductor systems embedded in homogeneous or multiple dielectric media. The technique employs exponential expansion of the Green's function for evaluation of the three-dimensional potential and its gradient, enabling rapid and accurate extraction of interconnect capacitance in VLSI and large-area amorphous silicon electro...

The size of every component for opto-electrical devices or micro electro-mechanical systems (MEMS) has been reduced in recent years due to progress in opto-digital communications technology. The demands for micro-sized holes, slits and 3D structures of hard brittle materials such as ceramics and glass are considerable, and this has stimulated research into new methods and systems for a micro-me...

INTRODUCTION Because they have higher isolation and lower insertion loss compared to semiconductor switches, the last decade has seen the development of several types of MEMS (Micro Electro Mechanical Systems) switch. Many of these are electrostatically actuated and so need high drive voltages, limiting the initial gap between the contact points to a few micrometers [1-3]. Such small gaps betwe...

The purpose of this study is a discussion on the multifaceted utilization indoor positioning systems such as building facility control, use situation grasping, and operational analysis in offices. Thermopile human sensors have been come into practical by MEMS (Micro Electro Mechanical Systems) technology are becoming widespread. In report, accuracy presence / absence count detection for thermop...

The frequency oscillator is a basic component found in many electrical, electronic, and communications circuits systems. Oscillators come variety of shapes sizes, depending on the range employed given application. Some applications need oscillators that generate low frequencies other extremely high frequencies. As result expansion speed modern technologies, new appeared operating at Most wirele...