Capillary force actuators provide forces via the alteration of the capillary pressure within a conducting liquid bridge through the application of electrical potential. A dynamic model of a capillary force actuator is developed. Separate models of the fluid/flexured platen and electrodynamics are constructed and linked together via the Young–Lippmann relation. Since the bridge height is small i...

This paper presents power delivery and actuation mechanisms designed for use in autonomous mobile robots whose dimensions can be measured in tens to hundreds of micrometers. Test devices utilizing these mechanisms have been fabricated at scale using micro-electromechanical systems (MEMS) technology, and have been shown capable of untethered locomotion at speeds exceeding 1.5 mm/sec (scale-compa...

MEMS electrostatic actuators suffer from pull-in instability, making them highly nonlinear and limiting their useful range of motion. This report resolves the performance-limiting issues gap-closing transducer by using an ultrathin dielectric layer (UDL) for actuation. The device has electromechanical coupling coefficient 4.26% average deflection sensitivity 119 nm/V over a 350 nm upto 3.3 V dc...

We propose a dome shaped touch sensor unit, which is small and is applicable in high temperature environment. The PZT thin film was made on the halfround Ti substrate, and the electrodes were deposited on its surface to form the sensor and driving actuator. The PZT thin film was made on the curved surface of the substrate by the hydrothermal method. The actuator part is driven by the high frequ...

We report on the development of high actuator count, micro-electromechanical (MEMS) deformable mirrors designed for high order wavefront correction in ground and space-based astronomical adaptive optics instruments. The design of these polysilicon, surface-micromachined MEMS deformable mirrors builds on technology that has been used extensively to correct for ocular aberrations in retinal imagi...

A compact (150 mm3150 mm), electrostatic actuator for out-of-plane (z) actuation of a probe tip has been designed, fabricated, and tested. Static deflections of 60.7 mm out of the plane of the substrate have been achieved. The device consists of a single crystal silicon tip on a torsional cantilever with out-of-plane interdigitated electrode capacitors. This cantilever and electrode design allo...

Practical artificial muscles are highly desirable in a wide range of applications: acoustically quiet underwater propulsion, exoskeletons, walker robots, prosthetics, and medical augments. 3D-printable microfluidic electrostatic biomimetic particular hold high promise for low-cost, energy-efficient, high-strength-to-weight-ratio, manufacturable actuator solutions. Their basic design operational...

We investigate the energy consumption and seek-time performance of different actuator types for nanopositioners, with emphasis on their use in a parallel-probe-based data-storage system. Analytical models are derived to calculate the energy consumption and performance of electrodynamic (coil and permanent magnet) and comb-drive actuators. The equations are used to simulate the operation of prob...

This paper provides an overview of fabrication and design of CMOS-based microelectromechanical systems with emphasis on inertial sensor and data storage applications. High-aspect-ratio (4.4:1) microstructures can be fabricated using conventional CMOS processing followed by a sequence of maskless dry-etching steps. The CMOS dielectric and metallization layers, normally used for electrical interc...

This paper presents a new actuation mechanism to drive comb-drive actuators. An asymmetric configuration of the finger overlap was used to generate capacitive coupling for the actuation mechanism. When the driving voltages were applied on the stators, a voltage would be induced at the rotor due to the capacitive coupling. Then, an electrostatic force would be exerted onto the rotor due to the v...