The nonlinear electrostatic pull-in behaviour of MEMS Switches in micro-electromechanical systems (MEMS) is investigated in this article. We used the distributed model when the electrostatic pressure didn’t apply at the whole of the beam and applied only in the mid-part of the beam. In this part the electrostatic area is different from two other parts. The model uses Euler-Bernoulli beam theory...

The elastic-electrostatic problem domain contains two charged bodies-one of them is a deformable elastic body with some geometric restraints, while the other is totally restrained and can be modeled as a rigid fixed body. Stresses, strains and deformations of the elastic body under electrostatic force are the quantities of interest. It is a two-way coupling problem, since the deformations is th...

The equation that describes the relationship between the applied voltage and the resulting electrostatic force within comb drives is often used to assist in choosing the dimensions for their design. This paper re-examines how some of these dimensions-particularly the cross-sectional dimensions of the comb teeth-affect this relationship in vertical comb drives. The electrostatic forces in severa...

We present a new tri-electrode topology for reducing the control voltage for electrostatic actuators. Conventional parallel plate actuators are dual-electrode systems, formed by the MEMS structure and the drive electrode. By placing a perforated intermediate electrode between these elements, a tri-electrode configuration is formed. This topology enables a low voltage on the intermediate electro...

This paper aims to investigate the pull-in phenomenon of functionally graded (FG) capacitive nanocantilevers subjected to an electrostatic force and thermal moment due to an applied voltage and thermal shock considering intermolecular force within the framework of nonlocal elasticity theory to account for the small scale effect. The FG nano-beam is made of mixture of metal and ceramic which the...