Geometric modeling is an important aspect of MEMS design. It not only creates geometric model for visual evaluation, but also supplies input for device performance analysis. This paper focuses on developing a feature-based geometric design methodology that enables designers to create fabrication-ready 3D models of MEMS devices without concerning the mask layout. Compared with present geometric ...

Laser direct writing (LDW) as a significant maskless lithography technique has been widely applied in scientific research and industrial manufacture. However, low fabrication resolution restricts its application in nanofabrication due to optical diffraction limit. This work presents a simple and novel way to improve the LDW fabrication resolution by multiple-exposure method with a low energy la...

Two limitations of additive manufacturing methods that arise from layer-based fabrication are slow speed and geometric constraints (which include poor surface quality). Both limitations are overcome in the work reported here, introducing a new volumetric additive fabrication paradigm that produces photopolymer structures with complex nonperiodic three-dimensional geometries on a time scale of s...

The authors present a novel hyperfidelity fabrication method for microlens arrays. The method consists of the steps of a fabrication of a sacrificial master mold of a microlens array in a soft polymer by photolithography and thermal reflow, b conformal duplication of a daughter mold of complementary patterns in a hard material by dispensing an UV-curable material liquid on top of the polymer mo...

New technologies and fabrication tools urge us to explore new materials and their potential for integration in architectural construction. One such material, Concrete Canvas, is explored in this paper for its hybrid characteristics that blend fabric and thin-shell tectonics. The potential of Concrete Canvas lies in its ability to modify itself from a flexible fabric that when activated with wat...

The recent convergence of computational design and digital fabrication has made new forms of architectural materialization possible. A workshop conducted at the Royal Melbourne Institute of Technology investigated how differentiated lightweight metal structures may be designed and fabricated under these new conditions. The workshop aim was to complete three such structures; each one is aggregat...

Many nano-optical applications require a suitable nanofabrication technology. Hole-mask colloidal nanolithography has proven to be a low-cost and large-area alternative for the fabrication of complex plasmonic nanostructures as well as metamaterials. In this paper, we describe the fabrication process step by step. We manufacture a variety of different plasmonic structures ranging from simple na...

In this paper, we demonstrate a fabrication process for large area (2 mm × 2 mm) fishnet metamaterial structures for near IR wavelengths. This process involves: (a) defining a sacrificial Si template structure onto a quartz wafer using deep-UV lithography and a dry etching process (b) deposition of a stack of Au-SiO₂-Au layers and (c) a 'lift-off' process which removes the sacrificial template ...