X-ray diffraction measurements were performed on Co?Pt1-?/Pd, Co/Pd, Co/Fe, and Co/W multilayer samples with different structures, such as Co?Pt1-? alloy layer composition ?, bilayer thickness, and number of bilayers. Multilayer samples were made by magnetron sputtering in a chamber with multi-parallel guns and a position controllable substrate. Co?Pt1-? alloy layers were deposited by cosputter...