نتایج جستجو برای: ion beam sputtering

تعداد نتایج: 313044  

Journal: :Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment 2015

2010
K. D. Schierbaum M. Cherradi M. Bouchtaoui

A LabVIEW 2009-based remote and process control program for an ultra-high vacuum system and a variety of surface science experiments is presented. The apparatus consists of five individual recipients for sample preparation, surface analysis, scanning tunneling microscopy and a central chamber connecting them by means of gate-valves. All processes like electron-beam heating, ion sputtering, gas ...

2003
Y. C. Chou K. H. Chen

Electrical properties and annealing behaviour of undoped and doped amorphous silicon carbon nitride (a-SiC N ) thin films, x y deposited by ion beam sputtering techniques, have been studied. Doping of the a-SiC N thin films with magnesium (Mg), and x y phosphorous (P) was carried out by ion implantation techniques, and subsequent annealing effect on the electrical conductivity (s) and activatio...

2015
A Sabouri C J Anthony P D Prewett J Bowen V Vishnyakov

In this study, the effects of dwell time on Ga focused ion beam machining at 30 keV for different milling currents were investigated. The surface topographies were analysed using atomic force microscopy (AFM) and the substrate structures were investigated by means of Raman spectroscopy. It has been observed that by increasing dwell time the total sputtering yield was increased even though the t...

2011
V. Surla P. Raman D. Burns M. J. Neumann D. N. Ruzic

Lithium evaporation treatments for ATJ graphite tiles in the National Spherical Torus Experiment (NSTX) have shown dramatic improvements in plasma performance increasing the viability of lithium as Plasma Facing Component (PFC) material. In order to understand the complex system of lithiated ATJ graphite, studies of physical and chemical erosion of plain and lithiated ATJ graphite are conducted...

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