Arrays of nanodots were directly patterned by interferometric lithography using a bright table-top 46.9 nm laser. Multiple exposures with a Lloyd's mirror interferometer allowed to print arrays of 60 nm FWHM features. This laser-based extreme ultraviolet interferometric technique makes possible to print different nanoscale patterns using a compact table-top set up.

This paper discusses the use of excimer lasers in the manufacture of microelectromechanical devices and systems. With emphasis on two application areas: laser micromachining of polymer masters for replication in metal by electroplating (Laser-LIGA), and laser-assisted manipulation of microparts for hybrid assembly. As a master fabrication method, laser micromachining offers advantages over conv...

The depth of mass ablation in planar Sn targets during the interaction with a pulsed Nd:YAG laser was investigated. The pulse duration and laser spot size were fixed, and the laser energy was varied to achieve laser intensities from approximately 10 to 10 W/cm, which is relevant to the extreme ultraviolet (EUV) lithography application. The ablation depth was measured by irradiating layered targ...

Microfluidic technologies are used to precisely manipulate fluid flow integrate solution-processed materials in semiconductor devices. Here, a microfluidic method for incorporating perovskite into semiconductor-based devices is developed by embedding microwires (MWs) Si microchannel platforms. The relies on pumping solution containing from the source be injected arrays using filter paper that a...

Multibeam interference represents an approach for producing one-, two-, and three-dimensional periodic optical-intensity distributions with submicrometer features and periodicities. Accordingly, interference lithography (IL) has been used in a wide variety of applications, typically requiring additional lithographic steps to modify the periodic interference pattern and create integrated functio...

Distributed feedback structures are essential for many applications in optics where wavelength-selectivity is required. This thesis focuses on the development of nanofabrication techniques for the fabrication of distributed feedback devices for optical communications. The distributed feedback laser and Bragg-grating-based optical filters single-pole, multiple-pole and integrated resonant channe...

Despite the attractiveness of low temperature hydrothermal processes, the synthesis of vertical ZnO nanostructures has mostly been limited to rigid substrates. Moreover, patterned growth of nanostructures is also commonly carried out on rigid substrates, since conventional optical lithography is not easily applied to polymeric substrates, as focusing and reaction of the substrate with the organ...