In this paper, a neural network based uniformity controller is developed for the linear chemical–mechanical planarization (CMP) process. The control law utilizes the metrology measurements of the wafer uniformity profile and tunes the pressures of different air-bearing zones on Lam linear CMP polishers. A feedforward neural network is used to self-learn the CMP process model and a direct invers...

We consider the problem of estimating self-exciting point process models from limited binary observations, where the history of the process serves as the covariate. We analyze the performance of two classes of estimators: l1-regularized maximum likelihood and greedy estimation for a discrete version of the Hawkes process and characterize the sampling tradeoffs required for stable recovery in th...

In this paper a methodology is developed to control linear and nonlinear processes using a fuzzy approach with the main assumption that the output of the process is monotone with respect to the input. Beginning with an empty rule base, a fuzzy model is on-line built. The rule base has a fixed number of rules determined à priori and not depending on the complexity of the process. The controller ...

For the simulation and optimization of large-scale chemical processes, the overall computing time is often dominated by the time needed to solve a large sparse system of linear equations. We present here a new parallel frontal solver which can signi cantly reduce the wallclock time required to solve these linear equation systems using parallel/vector supercomputers. The algorithm exploits both ...

This paper presents a parallel ATPG to speed up the test pattern generation process. The ATPG adopts the master-slave architecture to reduce the inter-process communication. Also, a smart fault list broadcast and fault partition technique is proposed to reduce test pattern inflation. Simulation results show that close to linear speed-up can be achieved for up to 7 slave processes.

For the simulation and optimization of large-scale chemical processes, the overall computing time is often dominated by the time needed to solve a large sparse system of linear equations. We present here a new parallel frontal solver which can signiicantly reduce the wallclock time required to solve these linear equation systems using parallel/vector supercomputers. The algorithm exploits both ...

the effect of geometry and material of the micro/nano particle on contact mechanic for manipulation was studied in this work based on atomic force microscopy. hertz contact model simulation for eph biological micro particle with spherical, cylindrical, and circular crowned roller shape was used to investigate the effect of geometry on contact simulation process in manipulation. then, to validat...

simulation of rough rice drying is one of the proper methods for predicting moisture distribution in the product, and throughout the process of drying. the drying process must be well understood and controlled so that design guidelines which reduce or minimize drying damage to rough rice can be established and improved. therefore, an accurate understanding and description of the drying mechanis...

hydroforming process in one of the most effective production method, for improving the drawing ratio in sheet metal forming process. this is due to the fact that in hydroforming process, forming takes place using a punch which drives the part forward via a controlled fluid pressure. in this paper, deep drawing hydroforming for circular punch is investigated. different pressure paths are tested ...