This paper presents an analytical modeling of a piezoelectric multi-layer cantilever used as a micro-electro-mechanical-system (MEMS) chemical sensor. Selectively coated microcantilevers have been developed for highly sensitive chemical sensor applications. The proposed piezoelectric chemical sensor consists of an array of multi-layer piezoelectric cantilevers with voltage output in the millivo...

Thermal effects in integrated piezoresistive MEMS pressure sensor may be a problem of concern in design for applications requiring high precision measurements and in continuously monitoring array of sensor network. It not only results in the shift of the offset voltage of the pressure sensor but also affects the performance of the adjacent CMOS circuit leading to erroneous values. To address th...

In this article, we report on the new design of a miniaturized strain microsensor. The proposed sensor utilizes the piezoresistive properties of doped single crystal silicon. Employing the Micro Electro Mechanical Systems (MEMS) technology, high sensor sensitivities and resolutions have been achieved. The current sensor design employs different levels of signal amplifications. These amplificati...

Reliability is a key parameter for the eventual prevalence of microelectromechanical systems (MEMS) as either sub-components or as standalone products. Traditionally, micromachined components have been made by separating the micromachined chip design and fabrication processes from the packaging and reliability issues. This “evolutionary” partitioning of microsystems has led to long incubation t...

In this paper the voltage/current characteristics and the effect of NO2 gas on the electrical conductivity of a PbPc gas sensor array is studied. The gas sensor is manufactured using vacuum deposition of gold electrodes on sapphire substrate with the lead-phathalocyanine vacuum sublimed on the top of the gold electrodes. In a comparison between two versions of the PbPc gas sensor array, it was ...

This paper presents field tests of challenging flight applications obtained with a new family of lightweight low-power INS/GNSS (inertial navigation system/global satellite navigation system) solutions based on MEMS (micro-electro-mechanical- sensor) machined sensors, being used for UAV (unmanned aerial vehicle) navigation and control as well as for aircraft motion dynamics analysis and traject...

Coronagraphic space telescopes require wavefront control systems for high-contrast imaging applications such as exoplanet direct imaging. High-actuator-count MEMS deformable mirrors (DM) are a key element of these wavefront control systems yet have not been flown in space long enough to characterize their on-orbit performance. The MEMS Deformable Mirror CubeSat Testbed is a conceptual nanosatel...

This research aims at enhancing the accuracy of land vehicular navigation systems by integrating GPS and Micro-Electro-Mechanical-System (MEMS) based inertial measurement units (IMU). This comprises improving the MEMS-based inertial output signals as well as investigating the limitations of a conventional Kalman Filtering (KF) solution for MEMS-IMU/GPS integration. These limitations are due to ...

Beyond printing text on paper, inkjet printing methods have recently been applied to print passive electrical and optical microparts, such as conductors, resistors, solder bumps and polymeric micro lenses. They are also useful to print micro-electro-mechanical systems (MEMS) as sub-millimeter sensor and actuator arrays, such as multifunctional skins applicable to robotic application and ambient...