In this investigation, micro voltage, temperature and humidity sensors were fabricated and integrated for the first time on a stainless steel foil using micro-electro-mechanical systems (MEMS). These flexible multi-functional micro sensors have the advantages of high temperature resistance, flexibility, smallness, high sensitivity and precision of location. They were embedded in a proton exchan...

In this work micro temperature and humidity sensors are fabricated to measure the junction temperature and humidity of light emitting diodes (LED). The junction temperature is frequently measured using thermal resistance measurement technology. The weakness of this method is that the timing of data capture is not regulated by any standard. This investigation develops a device that can stably an...

The 21st century sees significant breakthroughs in fabricating micro devices in the quest of miniaturising. Most micro parts have been manufactured in the range of less than 1mm. However, they are built based on material that is process dependant, resulting in monolithic parts. For example the Integrated Circuits, Micro Electro Mechanical System (MEMS) are silicon based, and on their own do not...

This paper proposes a general architecture for using evolutionary algorithms to achieve MEMS design synthesis. Functional MEMS devices are designed by combining parameterized basic MEMS building blocks together using Multi-objective Genetic Algorithms (MOGAs) to produce a pareto optimal set of feasible designs. The iterative design synthesis loop is implemented by combining MOGAs with the SUGAR...

Although Micro-Electro-Mechanical Systems (MEMS) are forming the basis for a rapidly growing industry and fields of research, many MEMS designers still rely on backof-the-envelope calculations due to a lack of efficient computer-aided design (CAD) tools that can assist with the initial stages of design exploration. This paper introduces case-based reasoning (CBR) techniques to the design of MEM...

This research aims at enhancing the accuracy of land vehicular navigation systems by integrating GPS and Micro-Electro-Mechanical-System (MEMS) based inertial measurement units (IMU). This comprises improving the MEMS-based inertial output signals as well as investigating the limitations of a conventional Kalman Filtering (KF) solution for MEMS-IMU/GPS integration. These limitations are due to ...

Electrostatic micro-electro-mechanical system (MEMS) is a special branch with a wide range of applications in sensing and actuating devices in MEMS. This paper provides a survey and analysis of the electrostatic force of importance in MEMS, its physical model, scaling effect, stability, nonlinearity and reliability in detail. It is necessary to understand the effects of electrostatic forces in ...

The micromachining technology that emerged in the late 1980s is able to provide micron-sized sensors and actuators. These micro transducers can be integrated with signal conditioning and processing circuitry to form micro-electromechanical systems (MEMS) that can perform real-time distributed control. This capability opens up new territory for flow control research. On the other hand, surface e...

The purpose of this study is a discussion on the multifaceted utilization indoor positioning systems such as building facility control, use situation grasping, and operational analysis in offices. Thermopile human sensors have been come into practical by MEMS (Micro Electro Mechanical Systems) technology are becoming widespread. In report, accuracy presence / absence count detection for thermop...