Direct writing of multi-depth microchannel branching networks into a silicon wafer with femtosecond pulses at 200 kHz is reported. The silicon wafer with the microchannels is used as the mold for rapid prototyping of microchannels on polydimethylsiloxane. The branching network is designed to serve as a gas exchanger for use in artificial lungs and bifurcates according to Murray’s law. In the de...

Machining-induced edge chipping damage represents a common challenge in ceramic applications. This paper reports on responses of zirconia materials with porous and dense microstructures to induced conventional ultrasonic vibration-assisted diamond machining. The machining-induced was evaluated using optical scanning electron microscopies. results show that produced these processes associated br...

The configuration of an autonomous decentralized manufacturing system using multi agent technology is proposed to get more flexibility. In this digital factory, all elements such as machine tool, assembly machine, AGV, and product are installed as agents. The product agents take the initiatives in the system. When a blank workpiece is put on the shop floor, the product agent is dynamically gene...

⎯ we present a normally open stepper motor actuated microvalve based on micro and fine-machining technique. In this paper, first we have described how the larger controllable flow range can be achieved with simple micromachining techniques and secondly we have presented the results which show how the performance of the microvalve can be improved by using combination of different metal screws fo...

By applying the etching via technology, this study proposes a novel front-side etching fabrication process for a silicon-based piezoresistive pressure sensor to replace the conventional back-side bulk micro-machining. This novel structure pressure sensor can achieve the distinguishing features of the chip size reduction and fabrication costs degradation. In order to investigate the sensor perfo...

Four-wire orthogonal structure for accurate measurement of fluid velocity and wind flow direction using silicon micro-machining on nitride membranes

Several medical tools with various functions have been developed for minimally invasive diagnostics and treatment. Microfabrication techniques such as MEMS technology are useful for the realization of high-performance multifunctional minimally invasive medical tools with small sizes. An ultra-miniature pressure sensor and an intravascular ultrasonic forward-viewing imager have been developed as...

Although intelligent machine learning techniques have been used for input-output modeling of many different manufacturing processes, these techniques map directly from the input process parameters to the outputs and do not take into consideration any partial knowledge available about the mechanisms and physics of the process. In this paper, a new approach is presented for taking advantage of th...

A new type of Acoustic Emission sensor using a thin film piezoelectric material (sputtered ZnO) was developed for measuring head-disk interaction in a rigid magnetic disk system. The sensor is mounted on a Si slider (length : 3 mm) and was fabricated using micro-machining techniques in our on-going efforts to downsize sliders. Some fundamental tests of the sensor were conducted : sensitivity an...