We present a new fabrication method to produce arrays of highly responsive polymer-metal core-shell magnetic microactuators. The core-shell fabrication method decouples the elastic and magnetic structural components such that the actuator response can be optimized by adjusting the core-shell geometry. Our microstructures are 10 μm long, 550 nm in diameter, and electrochemically fabricated in pa...

This paper presents the design and evaluation of a high force density fishbone shaped electrostatic comb drive actuator. This comb drive actuator has a branched structure similar to a fishbone, which is intended to increase the capacitance of the electrodes and hence increase the electrostatic actuation force. Two-dimensional finite element analysis was used to simulate the motion of the fishbo...

A piezoelectric (PZT) stack-based actuator was developed to provide a means of actuation with dynamic characteristics appropriate for small-scale manipulation. In particular, the design incorporates a highly nonlinear, large-ratio transmission that provides approximately two orders of magnitude motion amplijication from the PZT stack. In addition to motion amplijication, the nonlinear transmiss...

We report on the mechanical characterization and modeling of a non-prestretched dielectric elastomer diaphragm microactuator with ion-implanted electrodes under the influence of a distributed load (pressure). Thin PDMS membranes (30 μm thick, 2-3 mm diameter) were implanted on both side with gold ions by Filtered Cathodic Vacuum Arc and bonded on silicon chips with through-holes. A voltage appl...

Microsystems involve several fabrication technologies, but share the common trait of dimensions and motions measured in microns. Small feature sizes and deflections make the detection of microdevice motion particularly diftlcult. The rapid operating frequencies of many microactuators compound the detection problem. Effective feedback, control, and performance measurement of microactuators thus ...

Part 1 of this two-part paper describes the analysis and 2D finite element (FE) simulations for a capacitive incremental position sensor for nanopositioning of microactuator systems with a displacement range of 100 μm or more. Two related concepts for a capacitive incremental position sensor are presented. In an incremental capacitance measurement mode (ICMM), the periodic change in capacitance...

Vanadium dioxide (VO ) 2 , a promising multifunctional smart material, has shown strong promise in microactuation, memory, and optical applications. During thermally induced insulator-tometal phase transition of VO2, the changes of its electrical, mechanical, and optical properties demonstrate pronounced, complex hysteresis with respect to the temperature, which presents a challenge in the util...

We have designed, fabricated and characterized large displacement distributed-force polymer actuators driven only by the surface tension of water. The devices were inspired by the hygroscopic spore dispersal mechanism in fern sporangia. Microdevices were fabricated through a single mask process using a commercial photo-patternable silicone polymer to mimic the mechanical characteristics of plan...

In this study, a biological microactuator was demonstrated by closed-loop motion control of the front leg of an insect (Mecynorrhina torquata, beetle) via electrical stimulation of the leg muscles. The three antagonistic pairs of muscle groups in the front leg enabled the actuator to have three degrees of freedom: protraction/retraction, levation/depression, and extension/flexion. We observed t...