2010 WILEY-VCH Verlag Gmb Standard photolithography-based methods for fabricating microelectromechanical systems (MEMS) present several drawbacks including incompatibility with flexible substrates and limitations to wafer-sized device arrays. In addition, it is difficult to translate the favorable economic scaling seen in the capital equipment-intensive microelectronics industry to the manufact...

We propose an Ising machine made of microelectromechanical systems (MEMS), where the annealing process is automatically executed by a dissipation mechanism. The core structure series buckled plates. Two stable positions each plate (left and right) represent its binary state acting as bit so that works mechanical memory. electrostatic interaction between adjacent plates introduced applying volta...

This contribution presents a design approach as well characterization results for dielectric slot waveguides fabricated in highly resistive (HR) silicon (HR-Si) designed operation the terahertz (THz) frequency range. The authors discuss fundamentals of and respective figures merit. Furthermore, analytical solutions numerical from field simulations propagating mode are presented discussed. Proto...

A strategy for compact modeling is presented, that takes into account the specific problems associated with the development and production of microelectromechanical devices and systems (MEMS). For a MEMS compact model, a set of basis functions is derived from a continuous field model description by proper approximations. This set should represent all relevant coupling effects that determine the...

Stretchable microelectromechanical systems (MEMS) possess higher mechanical deformability and adaptability than devices based on conventional solid and flexible substrates, hence they are particularly desirable for biomedical, optoelectronic, textile and other innovative applications. The stretchability performance can be evaluated by the failure strain of the embedded routing and the strain ap...

Many implantable medical devices contain sophisticated electronic circuits. Hermetic packaging is required to provide the implant’s electronic circuitry with protection from the harsh environment of the human body. This chapter provides a review of available hermetic sealing methods and their applications. General considerations of implantable medical device packaging are discussed. Various tes...

An iris-type variable aperture fabricated using microelectromechanical systems (MEMS) technology is described. The device contains a number of shutter blades, which are each driven by a separate microactuator, and translated synchronously to create a variable polygonal aperture. The optical performance of devices with different numbers of blades is compared using simple analytic models and diff...

A S-band monolithic integrated switched filter bank has been designed to realize tunable working center frequency, and a tuning range of 12.9% from 2.7 to 3.05GHz was achieved with interval of 50MHz. The switched filter bank is designed using 8 eighth-order step impedance resonators (SIR) band-pass filters arranged in parallel rows. Microelectromechanical Systems (MEMS) switched circuit is inte...