The thermal atomic layer etching (ALE) of Al2O3 can be performed using sequential and self-limiting reactions with trimethylaluminum (TMA) and hydrogen fluoride (HF) as the reactants. The atomic layer deposition (ALD) of AlF3 can also be accomplished using the same reactants. This paper examined the competition between Al2O3 ALE and AlF3 ALD using in situ Fourier transform infrared (FTIR) vibra...

We report the characterization of aluminum oxide (Al2O3) films which are grown on Si substrates by electron beam evaporator. This paper focuses on the characteristic variation of Al2O3 films depending on the different annealing techniques, such as post-deposition annealing and post-metallization annealing. The capacitance-voltage (C-V) curves indicate a negative charge and interface trap charge...

The catalytic decomposition of ozone was carried out at 40 °C with a Pd/Al2O3 catalyst, in the presence or absence nitrogen oxides traces. NOx were produced during generation from air. Two set-ups used to examine possible effects poisoning, one fixed bed powder and another using monolith coated same catalyst. shown significantly poison resulting decrease conversion over time on stream. NOx-free...

Series of alkali and alkaline earth promi=oted palladium-alumina (Pd/Al2O3) catalysts were synthesised by incipient wetness method using palladium acetate dissolved in acetonitrile as a precursor for palladium. The dispersion on the catalyst surface was calculated from chemisorption CO molecule. tested under vapour phase hydrogenation phenol to cyclohexanone down-flow reactor at atmospheric pre...

The catalytic oxidation of CO is of great practical importance and is e.g. used in commercial 3-way catalysts reducing automotive emissions. Depending on the reaction conditions different oxide species, e.g. chemisorbed oxygen, surface oxides or bulk oxide may be present on the surface. Despite several previous studies there are still open questions concerning the exact surface composition (whi...