Abstract This work proposed a modified plasma induced charging (PID) detector to widen the detection range, for monitoring possible damage across wafer during advanced CMOS BEOL processes. New antenna designs patterns with extended capacitors are investigated. By adapting novel PID detectors, maximum levels of detectors have been enhanced.

The interaction mechanism between plasmas and electromagnetic waves has not been fully defined, experiments are helpful for investigating the verifying theoretical analysis. This paper proposes a point-focusing lens antenna based on three-dimensional (3D) printing technology experimental study of small-area plasma. First, CST simulation software was used design horn focusing lens. Subsequently,...

A new design of coplanar waveguide (CPW)-fed antenna with circular polarization (CP) and excellent impedance matching is presented. In this design a pair of circular-shaped slits is applied to opposite corners of the slot for enhancing the impedance matching and realizes bandwidth of 134.43% across 2.98-15.20 GHz for VSWR≤2. Furthermore this structure exhibits axial ration bandwidth (ARBW) of 3...

COMSOL has been used to model the propagation of electromagnetic waves in fusion plasmas. For the first time, a finite element method has been used to solve the wave propagation for realistic fusion plasma parameters in the lower hybrid and ion cyclotron frequency ranges. Moreover, for lower hybrid waves, a new efficient iterative algorithm has been developed to take into account the dispersive...

an active antenna for transmitter application in s frequency band is designed and analyzed using harmonic balance technique which is based on the nonlinear model of active devices. in this active antenna, the amplifier is integrated with the radiator which is a rectangular patch antenna. this patch antenna is analyzed employing full-wave momentum method. by applying nonlinear model of transisto...