The Metal-Ferroelectric-Semiconductor FET (MFSFET) device is structurally similar to a regular MOSFET device except that the gate material is composed of a ferroelectric material (PZT) normally sandwiched between two layers of silicon dioxide. Ferro models the PZT material with a set of four material parameters; the saturation polarization Ps, the remanent polarization Pr, the coercive field Ec...

We discuss the concept of lightweight segmented bimorph mirrors for adaptive optics. The segment consists of a monocrystal silicon substrate actuated by an array of in-plane piezoceramic (PZT) actuators with honeycomb electrodes. We focus on technological aspects of the segment design that are critical for space applications and describe a single segment demonstrator. The morphing capability of...

ABSTRACT This paper proposes a new valveless pump using a PZT diaphragm to create a gas jet flow for fluidic applications. The pump was designed and simulated based on transient fluidic analysis with experimental result of PZT diaphragm so that the features of micropump are reliably predicted. The experimental results of a PMMA prototype confirmed the performance of the pump. The fabrication pr...

The stacked PZT actuators are widely used in precision equipments. In this paper, a new type of mechanical magnifier incorporated with stacked PZT, which we brand it as MechaTrans is proposed. It is a two-step magnification mechanism and is capable of performing precise and high speed linear motion. 30 types of MechaTrans are commercialised. We have confirmed that the stroke is magnified up to ...

Lead zirconate titanate (Pb(1.1)(Zr(0.52)Ti(0.48))O(3)) thin films of thickness 260 nm on Pt/Ti/SiO(2)/Si substrates were densified by 2.45 GHz microwave annealing. The PZT thin films were annealed at various annealing temperatures from 400 to 700 °C for 30 min. X-ray diffraction showed that the pyrochlore phase was transformed to the perovskite phase at 450 °C and the film was fully crystalliz...

This paper presents a triple-finger gripper driven by a piezoceramic (PZT) transducer for multi-target micromanipulation. The gripper consists of three fingers assembled on adjustable pedestals with flexible hinges for a large adjustable range. Each finger has a PZT actuator, an amplifying structure, and a changeable end effector. The moving trajectories of single and double fingers were calcul...

This paper proposes the idea of etching PZT to improve the temperature variation rate of a thicker PZT sheet in order to enhance the energy conversion efficiency when used as pyroelectric cells. A partially covered electrode was proven to display a higher output response than a fully covered electrode did. A mesh top electrode monitored the temperature variation rate and the electrode area. The...

First-principles calculations are performed to investigate alloying and fer-roelectric effects in lead zirconate titanate (PZT) with high Ti composition. We find that the main effect of alloying in the paraelectric phase of PZT is the existence of two sets of B–O bonds, i.e., shorter Ti–O bonds vs. longer Zr–O bonds. On the other hand, ferroelectricity leads to the formation of very short coval...

In recent years, impedance measurement method by piezoelectric (PZT) wafer activesensor (PWAS) has been widely adopted for non-destructive evaluation (NDE). In this method, theelectrical impedance of a bonded PWAS is used to detect a structural defect. The electro-mechanicalcoupling of PZT materials constructs the original principle of this method. Accordingly, the electricalimpedance of PWAS c...