We report the effect of inert gas (argon and helium) along with different concentrations of oxygen on the structural and optical properties of the rf magnetron sputtered nanocrystalline tungsten oxide thin films. The crystal structure and surface morphology were studied by X-ray diffraction (XRD) and atomic force microscope (AFM), respectively. We find that the atomic mass of the sputtering gas...

Details of the boron nitride (BN) sputtering process are of interest for diagnostics and modeling of Hall thruster erosion. This contribution presents velocity distributions of sputtered boron atoms from BN targets. Measurements were performed for normally incident argon ions at energies of 300, 800, and 1200 eV, and xenon ion at 1200 eV. The velocity distributions were found using laser induce...

Au/Cu metallic films were deposited on p-Si(100) substrates with and without an Au upper layer by magnetron sputtering. The defect formation and nanoscale interfacial evolution at the Au/Cu and Cu/Si interfaces were studied by using Auger electron spectroscopy (AES) and high resolution transmission electron microscopy (HRTEM). The results showed that an increase in defects at the heterointerfac...

The amorphous alloys Ti 6 7 Si 3 3 , V 6 7Si 3 3 , and Cr , 7 Si 3 3 were produced by sputtering. Their structure was investigated by X-ray and neutron diffraction. X-ray diffraction showed that the structure of the three metallic glasses is not isomorphous. Neutron diffraction showed that S i -S i atomic pairs occur preferentially with distances distinctly larger than the atomic diameter of th...

We present a review of our study of interactions of plasma particles (atoms, molecules) with hydrogenated amorphous carbon surfaces typical of plasma-facing divertor tiles and deposited layers in magnetic-fusion reactors. Our computer simulations of these processes are based on classical molecular dynamics simulations, using the best currently available multibody bond-order hydrocarbon potentia...

Through changing the argon pressure, CaB6 films with different crystallographic orientation and morphology on glass substrates were prepared by direct current (DC) magnetron sputtering method. The film textures, crystallite sizes, composition and morphology were investigated by a spectrum of characterizing techniques in terms of X-ray diffraction (XRD), field emission scanning electron microsco...

We report the formation of wave-like structures and nanostructured fuzzes in the polycrystalline tungsten (W) irradiated with high-flux and low-energy helium (He) ions. From conductive atomic force microscope measurements, we have simultaneously obtained the surface topography and current emission images of the irradiated W materials. Our measurements show that He-enriched and nanostructured st...

We report on the preparation, atomic resolution imaging, and element selective damage mechanism in atomically thin boron nitride membranes. Flakes of less than 10 layers are prepared by mechanical cleavage and are thinned down to single layers in a high-energy electron beam. At our beam energies, we observe a highly selective sputtering of only one of the elements and predominantly at the exit ...

We report on in situ studies of the vibrational properties of Si nanoparticles and ultrathin layers grown by dc magnetron sputtering in ultrahigh vacuum on amorphous MgO and Ag buffer layers. The average thickness of the Si layers ranged from monolayer coverage up to 200 Å. Transmission electron microscopy has been used to determine size and shape of the Si nanoparticles. Changes in the phonon ...

The ion-stimulated desorption of organic molecules by impact of large and slow clusters is examined using molecular dynamics (MDs) computer simulations. The investigated system, represented by a monolayer of benzene deposited on Ag{1 1 1}, is irradiated with projectiles composed of thousands of noble gas atoms having a kinetic energy of 0.1–20 eV/atom. The sputtering yield of molecular species ...