Among physical vapor deposition techniques thermal evaporation (TE) is the one with the longest standing tradition. However, during the last 30 years of booming semiconductor industry which involves a great deal of thin film technology, deposition techniques like CVD (chemical vapor deposition) or sputtering which often offer unquestionable advantages have been developed to perfection and TE ha...

Vapor-phase synthesis techniques of polymeric nanostructures offer unique advantages over conventional, solution-based techniques because of their solventless nature. In this work, we report the fabrication of coaxial polymer nanotubes using two different chemical vapor deposition methods. The fabrication process involves the deposition of an outer layer of the conductive polyaniline (PANI) by ...

In this paper we review and provide an overview to the understanding of the chemical vapor deposition (CVD) of diamond materials with a particular focus on the commonly used microwave plasma-activated chemical vapor deposition (MPCVD). The major topics covered are experimental measurements in situ to diamond CVD reactors, and MPCVD in particular, coupled with models of the gas phase chemical an...

Aligned carbon nanotube (CNT) arrays were fabricated from a multilayer catalyst configuration by microwave plasma-enhanced chemical vapor deposition (PECVD). The effects of the thickness and annealing of the aluminum layer on the CNT synthesis and thermal performance were investigated. An experimental study of thermal resistance across the CNT array interface using the modified ASTM D5470 stand...

Title of thesis: A SIMPLIFIED MODEL OF PLANETARY CHEMICAL VAPOR DEPOSITION REACTORS Negin Shahshahan, Master of Science, 2009 Directed by: Professor Raymond A. Adomaitis Department of Chemical and Biomolecular Engineering A simplified model for planetary chemical vapor deposition reactors is proposed and used to compute deposition species mole fraction and deposition rate in the reactor depleti...

The suitability of three vapor deposition techniques for pore size modification was evaluated using polycarbonate track etched membranes as model supports. A feature scale model was employed to predict the pore geometry after modification and the resulting pure water flux. Physical vapor deposition (PVD) and pulsed plasma-enhanced chemical vapor deposition (PECVD), naturally, form asymmetric na...