RF MEMS capacitive switches capable of orderof-magnitude impedance changes have demonstrated operating lifetimes exceeding 100 billion switching cycles without failure. In situ monitoring of switch characteristics demonstrates no significant degradation in performance and quantifies the charging properties of the switch silicon dioxide film. This demonstration leads credence to the mechanical r...

RF/microwave MEMS technology. Part one begins with a brief discussion of RF/microwave system requirements, and then introduces the enabling potentialities of the MEMS arsenal to meet these requirements. In particular, MEMS fabrication techniques are addressed, and fundamental components, including inductors, varactors, resonators and transmission lines, as well as the design/ CAD paradigm, are ...

In this paper we present the design and fabrication of an RF MEMS tunable band-pass filter. The band-pass filter design uses both distributed transmission lines and RF MEMS capacitances together to replace the lumped elements. The use of RF MEMS variable capacitances gives the flexibility of tuning both the centre frequency and the band-width of the band-pass filter. A prototype of the tunable ...

A new approach to wideband and smart re-configurable antennas using RF MEMS switches and fractal antennas is presented. Index Terms – Smart antennas, wideband, fractals, RF-MEMS.

This article presents the response of RF microelectromechanical systems (RF MEMS), barium strontium titanate (BST), and gallium arsenide (GaAs)-based tunable filters and reconfigurable matching networks to a wideband code-division-multiple-access signal centered at 1.95 GHz. The RF MEMS tunable filter and impedance tuner result in very low intermodulation distortion and spectral regrowth compar...

RF-MEMS technology has the potential of replacing many of the mechanical and semiconductor switches used in mobile and satellite communication systems. In many cases, such RF-MEMS switches would not only reduce substantially the size and power consumption, but also promise superior performance. The paper reviews the recent development of RF MEMS switches and switch matrices. Several configurati...

this paper presents a wide band RF MEMS VCO operating at 10 GHz. The designed VCO is based on high performances RF MEMS solenoid inductor. We have used HFSS software for design and analysis of different RF MEMS solenoid inductors. Best performances are obtained using SU8 dielectric substrate and copper coil: Qmax= 60.9, L = 2.6 nH at 10 GHz, and SRF= 20.8 GHz. Moreover, we have investigated the...

Having now produced devices with sufficient Q, thermal stability, aging stability, and manufacturability, vibrating RF MEMS technology is already finding its way into next generation timing and wireless applications. At this juncture, the technology is now poised to take its next logical steps: higher levels of circuit complexity and integration. In particular, as vibrating RF MEMS devices are ...

In the present work, the deposition and characterization of dielectric, piezoelectric, semiconductor and conductor films by RF diode / RF magnetron sputtering process for applications in MEMS fabrication have been reported. Thin films of silicon dioxide, silicon nitride, amorphous silicon, zinc oxide and lanthanum doped lead zirconate titanate (PLZT) were prepared by RF sputtering process and e...