In this paper, a new three-axis electromagnetically actuated micromirror structure has been proposed and fabricated. It is electromagnetically actuated at low voltage using an external magnetic field. The main purpose of this work was to obtain a three-axis actuated micromirror in a mechanically robust structure with large static angular and vertical displacement at low actuation voltage for fi...

Electrical actuation of liquid droplets at the microscale offers promising applications in the fields of microfluidics and lab-on-a-chip devices. Much prior research has targeted the electrical actuation of electrically conducting liquid droplets; however, the actuation of dielectric droplets has remained relatively unexplored, despite the advantages associated with the use of a dielectric drop...

This paper reports on the design of a novel ultra low actuation voltage, low loss radio frequency micro-electro-mechanical system (RF MEMS) capacitive shunt switch. The concept of the switch relies on a mechanically unconstrained armature actuated over a coplanar waveguide using electrostatic forces. The minimum actuation voltage of the switch is <2V, with an isolation of 40dB and insertion los...

Electrical actuation of liquid droplets at the microscale offers promising applications in the fields of microfluidics and lab-on-chip devices. Much prior research has targeted the electrical actuation of electrically conducting liquid droplets using dc voltages (classical electrowetting). Electrical actuation of conducting droplets using ac voltages and the actuation of insulating droplets (us...

 Using the SEM analysis technique, we present the first direct evidences of the non-uniform distribution of charges trapped in the dielectric layer during the actuation of electrostatic MEM devices. We highlight the importance of the contact quality to control the charge injection in the dielectric. We further incorporate the non-uniform charge distribution in a 2D model of the actuation of de...

Inchworm based on the voltage actuation of dielectric elastomer actuators (DEAs) are amongst the simplest types of robots. We demonstrate a proof-of-concept inchworm robot that incorporates a few aligned fibers to suppress undesirable actuator bulging and more effectively convert the bending of a dielectric elastomer unimorph to forward motion. Finite element modeling confirms the role of the f...

Subject to a voltage, a dielectric elastomer (DE) deforms. Voltage-induced strains of above 100% have been observed when DEs are prestretched, and for DEs of certain network structures. Understanding mechanisms of large actuation strains is an active area of research. We propose that the voltage-stretch response of DEs may be modified by prestretch, or by using polymers with ‘‘short’’ chains. T...

In this paper a novel RF MEMS cantilever type switch with low actuation voltage is presented. The cantilever beam of switch is supported by two L-shaped springs to reduce the spring constant. The switch is simulated using Intellisuite software. The actuation voltage of switch is achieved about 2 volt and the size of the switch is 110×60μm, that in compared with other electrostatic cantilever be...

We propose an electrostatically-actuated microelectromechanical digital-to-analog converter (M-DAC) device with low actuation voltage. The spring structures of the silicon-based M-DAC device were monolithically fabricated using parylene-C. Because the Young's modulus of parylene-C is considerably lower than that of silicon, the electrostatic microactuators in the proposed device require much lo...