In this paper, an Adaptive Neuro Fuzzy Inference System (ANFIS) based control is proposed for the tracking of a Micro-Electro Mechanical Systems (MEMS) gyroscope sensor. The ANFIS is used to train parameters of the controller for tracking a desired trajectory. Numerical simulations for a MEMS gyroscope are looked into to check the effectiveness of the ANFIS control scheme. It proves that the sy...

This paper presents the design and application of a lever coupling mechanism to improve the shock resistance of a dual-mass silicon micro-gyroscope with drive mode coupled along the driving direction without sacrificing the mechanical sensitivity. Firstly, the mechanical sensitivity and the shock response of the micro-gyroscope are theoretically analyzed. In the mechanical design, a novel lever...

This paper represents a MEMS based gyroscope to measure orientation. Silicon-micro-machined gyro is fabricated on the basis of resonators and they use vibrating mechanical element to sense rotation. The vibratory measurement can be done by measuring the change in capacitance with respect to the voltage or force applied in particular axis. Here MEMS based gyroscope has been designed from Lame mo...

in this paper, the stability of a functionally graded magneto-electro-elastic (fg-mee) micro-beam under actuation of electrostatic pressure is studied. for this purpose euler-bernoulli beam theory and constitutive relations for magneto-electro-elastic (mee) materials have been used. we have supposed that material properties vary exponentially along the thickness direction of the micro-beam. gov...

Spontaneous emission noise is an important limit to the performance of active plasmonic devices. Here, we investigate the spontaneous emission noise in the long-range surface plasmon-polariton waveguide based optical gyroscope. A theoretical model of the sensitivity is established to study the incoherent multi-beam interference of spontaneous emission in the gyroscope. Numerical results show th...

Owing to the imposed coupling accelerations such as quadrature error and cross-axis perturbation, the micro-machined gyroscope could not be unconditionally retained at resonant mode. Once the preset resonance is not sustained, the performance of the micro-gyroscope is accordingly degraded. In this paper, a direct model reference adaptive control loop which is integrated with a modified disturba...

The characteristics of high shock resistance of a novel vibration beam structure gyroscope, namely Node-Plane Supporting Vibration Beam Gyroscopes (NPSG) were researched in this paper. NPSG is a novel rotating rate sensor, which used supporting planes located at node points instead of the supporting pins to support the vibration beam. In this paper, the sensing principle of the NPSG is presente...

This review surveys micromachined gyroscope structure and circuitry technology. The principle of micromachined gyroscopes is first introduced. Then, different kinds of MEMS gyroscope structures, materials and fabrication technologies are illustrated. Micromachined gyroscopes are mainly categorized into micromachined vibrating gyroscopes (MVGs), piezoelectric vibrating gyroscopes (PVGs), surface...

In this study, the free vibration analysis of smart vibration control (SVC) systems based on Reddy – Levinson model and modified strain gradient theory is developed. This system consist of a micro beam at middle and two magneto-electro-elastic (MEE) composite micro beams at top and bottom which connected by enclosing elastic medium and simulated by Winkler and Pasternak foundation. The effects ...