The study investigates a capacitive micro pressure sensor integrated with a ring oscillator circuit on a chip. The integrated capacitive pressure sensor is fabricated using the commercial CMOS (complementary metal oxide semiconductor) process and a post-process. The ring oscillator is employed to convert the capacitance of the pressure sensor into the frequency output. The pressure sensor consi...

In this work, a design of wireless system for multi-sensors monitoring has been presented. The main purpose of this research is to develop an efficient telemetry system for measuring water pressure and temperature signals. The system reads data from two types of sensors, temperature (resistive) and pressure (capacitive). Anderson circuit configuration has been used for the resistive sensor, sin...

The effect of the humidity of the surrounding atmosphere on the characteristics of capacitive structures is a known problem for capacitive gas-pressure sensors. However, the use of a differential mode of operation can provide a good solution – only the manufacturing of the ceramic structures with the appropriate pairs of capacitive sensing elements remains a major challenge. In order to find a ...

In the framework of developing innovative microfabricated pressure sensors, we present here three designs based on different readout principles, each one tailored for a specific application. A touch mode capacitive pressure sensor with high sensitivity (14 pF/bar), low temperature dependence and high capacitive output signal (more than 100 pF) is depicted. An optical pressure sensor intrinsical...

This paper presents design and assembly of mixed electronic circuitry for measured signal processing of the capacitive difference pressure sensor, as well as analysis of the obtained results. The smart pressure sensor provides values of measured pressure via 4 20 mA current loop output. The loop current is also used for sensor circuitry supplying. This means that current consumption of the whol...

A novel gas-sealed capacitive pressure sensor with a temperature compensation structure is reported. The pressure sensor is sealed by Au-Au diffusion bonding under a nitrogen ambient with a pressure of 100 kPa and integrated with a platinum resistor-based temperature sensor for human activity monitoring applications. The capacitance-pressure and capacitance-temperature characteristics of the ga...

In this paper, An analytical and simulation solution for touch mode Micro-electromechanical systems (MEMS) capacitive pressure sensor operating in harsh environment is proposed, The principle of the paper is to design, obtain analytical solution and compare the results with the simulation using coventor software for a circular diaphragm deflection before and after touch point. The material is c...