This paper studies the surface finish and integrity of glass, silicon, some advanced ceramics and aluminum-based metal matrix composites (MMCs) reinforced with ceramic particles, precision machined by various machining processes. The studies revealed that grinding/lapping operations using inexpensive machine tools can produce ductile streaks on glass and silicon surfaces under good grinding/lap...

This paper presents results obtained from the grinding of aluminium-based metal matrix composites reinforced with either aluminium oxide (Al2O3) or silicon carbide (SiC) particles using grinding wheels made of SiC in a vitrified matrix or diamond in a resin-bonded matrix. The study used grinding speeds of 1100–2200 m min , a grinding depth of 15 m for rough grinding and 0.1–1 m for fine grindin...

Nanoscale solely amorphous layer is achieved in silicon (Si) wafers, using a developed diamond wheel with ceria, which is confirmed by high resolution transmission electron microscopy (HRTEM). This is different from previous reports of ultraprecision grinding, nanoindentation and nanoscratch, in which an amorphous layer at the top, followed by a crystalline damaged layer beneath. The thicknesse...

In order to machine micro structured dies and molds made of ceramics, micro milling tools made of poly-crystalline diamond (PCD) are developed. Many cutting edges are ground with diamond wheels. Tool wears of the PCD milling tool are evaluated by cutting spherical molds made of binder-less tungsten carbide and structured surfaces are machined for trial. From the experiments, it is clarified tha...

This paper describes the methods using bonded cup wheels for grinding toroidal and cylindrical SiC mirrors with large curvature radii. Since the angle between the cutting direction of bonded abrasives and feed direction of the cup wheel is about 90 °, it is possible to obtain a surface with very low surface roughness independent of the direction of measurement. Toroidal mirrors, circular and el...

A new development of hybrid in-process electrical dressing of metal-bonded diamond grinding wheels is proposed in this paper. The electrical dressing method is used for overcoming the limitations of the conventional dressing methods available in relation to a super-abrasive wheel because of the hardness of its abrasive grains and the durability of its bonding material. The proposed hybrid in-pr...