This paper presents the fabrication and mechanical characterization of electrostatically actuated micro bimorphs integrated with race-track ring resonators, for optical tuning applications. The bimorphs, having an upward deflection in the off-state, are integrated by surface micromachining techniques with race-track ring resonators fabricated on Silicon On Insulator (SOI) wafers. Using electros...

Electrostatically actuated Micro-Electro-MechanicalSystems (MEMS) based micromirror is a fundamental building block for a variety of optical network applications, such as optical wavelength-selective switching, add/drop multiplexing, and optical cross-connecting. The design, analysis and testing of a 2-Dimensional (2D) electrostatically actuated torsional MEMS micromirror is presented in this p...

INTRODUCTION Because they have higher isolation and lower insertion loss compared to semiconductor switches, the last decade has seen the development of several types of MEMS (Micro Electro Mechanical Systems) switch. Many of these are electrostatically actuated and so need high drive voltages, limiting the initial gap between the contact points to a few micrometers [1-3]. Such small gaps betwe...

Ultrasound wave is a kind of waves with the frequency higher than the human audible frequency. Although ultrasound was first used for military identification purposes, it has been used for decades for various other applications, especially medical applications. Medical applications of ultrasound include diagnostic and therapeutic applications, such as for the treatment of cancer. In this paper,...