: In this work, a new approach for the one-step integration of interdigitated electrodes on macroporous silicon substrates is presented. Titanium/gold interdigitated electrodes are used to pattern p-type silicon substrates prior the anodization in an organic electrolyte. The electrolyte characteristics, conductivity, and pH have been found to affect the adherence of the metal layer on the silic...

Ž . A capacitive sensor has been developed for measuring the vertical deflection of bridge-type micro-electromechanical MEMS silicon actuators. The sensor requires no electrodes above the actuator surface and does not require the actuator diaphragm to be used as a signal electrode. Sets of interdigitated electrodes, one for ac signal injection and the other for signal sensing, are placed beneat...

The suitability of polysilicon as a material for the fabrication of interdigitated electrodes and their application to the development of sensors is studied in this work. The main interest in using this material lies in the possibility of obtaining integrated sensors with commercial CMOS technologies and simple post-processing steps. Electrodes with 3μm finger width and 3, 10, and 20μm spacing ...

This study investigates the fabrication and characterization of an acetone microsensor with a ring oscillator circuit using the commercial 0.18 μm complementary metal oxide semiconductor (CMOS) process. The acetone microsensor contains a sensitive material, interdigitated electrodes and a polysilicon heater. The sensitive material is α-Fe2O3 synthesized by the hydrothermal method. The sensor re...

A concept of moving dielectrophoresis electrodes (MDEP) based on Microelectromechanical Systems (MEMS) actuators is introduced in this letter. An example design of tuneable dielectrophoresis filter is presented. Finite Element Analysis of the electrostatic field of the tuneable filter has been conducted. Results show that the trapping force can be adjusted by actuating the MEMS actuators. The p...

A humidity microsensor integrated with a readout circuit on-a-chip fabricated using the commercial 0.18 μm CMOS (complementary metal oxide semiconductor) process was presented. The integrated sensor chip consists of a humidity sensor and a readout circuit. The humidity sensor is composed of a sensitive film and interdigitated electrodes. The sensitive film is titanium dioxide prepared by the so...

The study develops an integrated humidity microsensor fabricated using the commercial 0.18 μm complementary metal oxide semiconductor (CMOS) process. The integrated humidity sensor consists of a humidity sensor and a ring oscillator circuit on-a-chip. The humidity sensor is composed of a sensitive film and branch interdigitated electrodes. The sensitive film is zinc oxide prepared by sol-gel me...