The lifetime of micro electro–thermo–mechanical actuators with complex electro–thermo–mechanical coupling mechanisms can be decreased significantly due to unexpected failure events. Even more serious is the fact that various failures are tightly coupled due to micro-size and multi-physics effects. Interrelation between performance and potential failures should be established to predict reliabil...

Application of Inkjet-Printing Technology to Micro-Electro-Mechanical Systems

The development of a novel system integrating SU-8 micro-grippers with a tensile force sensor for handling and characterising the mechanical properties of delicate biological samples, such as fibrils, is presented. The micro-grippers are actuated by the electro-thermal effect and have gripping forces comparable to the common “hot-and-cold-arm” grippers. A thorough and robust finite element mode...

Fabrication, characterization and application of micro-/nano-rods/wires are among the hottest topics in materials science and applied physics. Micro-/nano-rod-based structures and devices are developed for a wide-ranging use in various fields of micro-/nanoscience (e.g. biology, electronics, medicine, optics, optoelectronics, photonics and sensors). It is well known that the structure and prope...

A submicroscale flow sensor has been developed that consists of a suspended hot film and carbon nanotube (CNT) fins. Flow measurement experiments, together with a theoretical model, revealed the advantages of the use of CNT fins. The suspended metal film reduces heat loss and the CNT fins enhance the heat transfer to the fluid flow. Herein, the working principle of the CNT fins is presented in ...

The fields of micro- and nanomechanics are strongly interconnected with the development micro-electro-mechanical (MEMS) nano-electro-mechanical (NEMS) devices, their fabrication applications. This article highlights biomimetic concept designing new nanodevices for advanced materials sensing

Fabrication, characterization and application of micro-/nano-rods/wires are among the hottest topics in materials science and applied physics. Micro-/nano-rod-based structures and devices are developed for a wide-ranging use in various fields of micro-/nanoscience (e.g. biology, electronics, medicine, optics, optoelectronics, photonics and sensors). It is well known that the structure and prope...

This paper presents a comprehensive case study on electro-mechanical analysis of MEMS[1] variable capacitors. Using the fundamental mechanical and electrical equations, static and dynamic behaviors of the device are studied. The analysis is done for three different modes, namely: dc (static mode), small signal ac and large signal regime. A complete set of equations defining dynamic behavior of ...

In this study, electro-thermo-mechanical nonlinear vibration and instability of embedded piezoelectric micro-tube is carried out based on nonlocal theory and nonlinear Donnell's shell model. The smart micro-tube made of Poly-vinylidene fluoride (PVDF) is conveying an isentropic, incompressible fluid. The detailed parametric study is conducted, focusing on the remarkable effects of mean flow vel...

We simulate the dynamic and temperature depen dent behavior of two di erent Micro Electro Mechanical Systems MEMS by utilizing recently developed par allel codes which enable a coupling of length scales The novel techniques used in this simulation accurately model the behavior of the mechanical components of MEMS down to the atomic scale by combining the power of an atomistic simulation with th...