micro-electro-mechanical systems (mems) are combination of electrical and mechanical components in micron dimensions. in recent years, holding, actuating methods and handling of mems components such asmicrogripper, microsensors and etc. have been deeply studied. microgrippers for handling, positioning andassembling of micro components are very useful so that for clamping need actuation created ...

The paper demonstrates reduced order modeling (ROM) of the strongly coupled system level dynamic analysis of micro electro mechanical systems (MEMS) by lumped finite elements (FE) and substructuring implemented in the ANSYS/Multiphysics program. Index terms Micro Electromechanical Systems (MEMS), Finite elements (FE), Coupled analysis, Reduced order modeling (ROM)

MEMS (Micro-electro-mechanical systems) have shown promise for optical crossconnects in WDM networks. We will describe various MEMS optical-switching technologies, their successes in implementing important optical-networking functionalities, and future perspectives.

Micro-electro-mechanical systems (MEMs) are Combination of electrical and mechanical components in Micron dimensions. In recent years, holding, actuating methods and handling of MEMs components such as microgripper, microsensors and etc. have been deeply studied. Microgrippers for handling, positioning and assembling of micro components are very useful so that for clamping need actuation create...

Micro-Electro-Mechanical Systems, or MEMS, are integrated micro devices or systems combining electrical and mechanical components. They are fabricated using integrated circuit (IC) batch processing techniques and can range in size from micrometers to millimeters. These systems can sense, control and actuate on the micro scale, and function individually or in arrays to generate effects on the ma...

Technological problems for realization of Micro Electro-mechanical System (MEMS) are discussed and an introduction of smart materials (PZT) is encouraged. The film formation and micromachining technology are discussed in integration of PZT thin films into MEMS. Further developments are proposed on PZT micro sensors and actuators with special emphasis laid on exploration of new application field...

Micro-electro-mechanical systems (MEMs) are Combination of electrical and mechanical components in Micron dimensions. In recent years, holding, actuating methods and handling of MEMs components such as microgripper, microsensors and etc. have been deeply studied. Microgrippers for handling, positioning and assembling of micro components are very useful so that for clamping need actuation create...

In this paper, an Adaptive Neuro Fuzzy Inference System (ANFIS) based control is proposed for the tracking of a Micro-Electro Mechanical Systems (MEMS) gyroscope sensor. The ANFIS is used to train parameters of the controller for tracking a desired trajectory. Numerical simulations for a MEMS gyroscope are looked into to check the effectiveness of the ANFIS control scheme. It proves that the sy...

Beyond printing text on paper, inkjet printing methods have recently been applied to print passive electrical and optical microparts, such as conductors, resistors, solder bumps and polymeric micro lenses. They are also useful to print micro-electro-mechanical systems (MEMS) as sub-millimeter sensor and actuator arrays, such as multifunctional skins applicable to robotic application and ambient...

The paper introduces a new methodology with a distributed triangle transducer for the strongly coupled simulation of micro electro mechanical systems (MEMS) in ANSYS Finite Element (FE) program.