The fabrication of the micro-channel array through micro-embossing on an ultrafine-grained (UFG) LZ91 Mg-Li alloy was investigated in this paper. Micro-embossing tests indicated that the depth of the channels increase with increasing temperatures. Micro-array channels with widths ranging from 50 μm to 200 μm were performed with an applied force of 2 kN at 423 K, following by a dwell time of 60 ...

Microfabrication is actually a collection of technologies which are utilized in making microdevices. Some of them have very old origins, not connected to manufacturing, like lithography or etching. Electroplating is technique adapted to produce micrometre scale structures, as are various stamping and embossing techniques. Micro-Components are required in a range of new products such as medical ...

Micro-mirror arrays are currently being developed by a number of companies for optical switching. To bring these products to the market quickly, a rapid development cycle is needed, leaving little time for multiple fabrication runs. CAD tools for MEMS can reduce the number of fabrication iterations run by allowing prototyping to occur within the virtual environment. Here, many models can be tes...

We present the use of a liquid crystal spatial light modulator to correct for the refractive-index mismatch induced spherical aberration in a high refractive-index lithium niobate crystal when a low repetition rate amplified laser is used for the direct fabrication of three-dimensional micro-structures. By correcting the aberration based on experimentally determined values, we show that the siz...

A new type of micro-channel plate detector based on hydrogenated amorphous silicon is proposed which overcomes the fabrication and performance issues of glass or bulk silicon ones. This new type of detectors consists in 80-100 μm thick layers of amorphous silicon which are micro-machined by deep reactive ion etching to form the channels. This paper focuses on the structure and fabrication proce...

Micro-optical devices, e.g., micro lenses, micro mirrors, play an important role in high speed data, voice and video signal transmissions. In this study, a new method of fabricating micro optical devices was investigated. The method is different from traditional fabrication processes in the sense that that the micro optical elements were simultaneously machined in a process known as slow tool s...

This manuscript completes the analysis of our SIGGRAPH 2013 paper [Levin et al. 2013], ”Fabricating BRDFs at High Spatial Resolution Using Wave Optics” in which photolithography fabrication was used for manipulating reflectance effects. While photolithography allows for precise reflectance control, it is costly to fabricate. Here we explore an inexpensive alternative to micro-fabrication, in th...

Lithography, the fundamental fabrication process of semiconductor devices, is playing a critical role nowadays in the fabrication of microand nano-structures especially for the realization of micro-electro-mechanical systems (MEMS), microfluidic devices, photonic crystals, photonic integrated circuits, micro-optics, and plasmonic optoelectronic devices. These devices have various practical appl...

In recent years, the scaling of microelectronic, photonic and micro-electromechanical systems (MEMS) to the 50-500 nm length scale has challenged the capability of conventional micro-fabrication technologies in the cost-effective, mass production of devices and integrated systems [1]. There is an increasing need to develop new nano-fabrication technologies to address the challenges of decreasin...

...................................................................................................................... xv Résumé .................................................................................................................... xvii 摘 要 ......................................................................................................................xix Introduction ..........