In this paper, a model reference adaptive control is designed for perfect tracking of moveable electrode of an electrostatic microactuator. The adaptive control of the nonlinear model of this microactuator is constituted feedback control and adaptation law. A Lyapunov function is presented that it guarantees perfect tracking and parameter convergences. The simulation shows designed adaptive con...

In this paper, a modular microactuator based on shape memory alloy (SMA) actuation to drive the joints of a microgripper is described. Its design is a combination of two SMA actuators installed on the links of a special mechanism : one of them drives the rotation of the joint and the other one produces the necessary force to manipulate objects. An accurate model of the thermo-mechanical behavio...

This paper reports the first design and its simulation and experimental results of a CMOS z-axis microactuator that utilizes the vertical electrostatic forces existing between multi-conductor comb fingers. The measured maximum displacement of the z-axis microactuator is 3.5 μm, and resonant frequency 6.17 kHz, which are in good agreement with the field simulation and the behavioral simulation r...

This article presents the design of a magnetic microactuator comprising soft material blocks and flexible beams. The modular layout proposed promotes scalability towards different microrobotic applications using low fields. presented consists three (Ni-Fe 4750) connected together via two Polydimethylsiloxane (PDMS) semi-circular A detailed approach is highlighted giving considerations toward co...

Hard disk drives (HDDs) used for data servers are exposed to various vibrations. These vibrations mainly caused by the cooling fan that controls temperature inside server. The vibration affects positioning accuracy of magnetic heads read/write digital data. This is an obstacle obtaining high transfer rates. To compensate vibration, control system must have higher frequency bandwidth as spectra ...

— A microactuator technology that combines magnetic thin films with polysilicon flexural structures is described. Devices are constructed in a batch-fabrication process that combines electroplating with conventional lithography, materials, and equipment. A microactuator consisting of a 400x(47-40)x7 µm 3 rectangular plate of NiFe attached to a 400x(0.9-1.4)x2.25 µm 3 polysilicon cantilever beam...

This paper reviews the activities in the field of microrobotics of two closely co-operating microsystem groups in Finland. Topics covered include mechanical and biological micromanipulators, microactuator modeling, modeling of handling tasks and prototyping gastrointestinal biotelemetering device.

Microsensors and microactuators are considered to be the most crucial elements of micro-electromechanical systems (MEMS) and devices. There has been growing interest in the development of new microactuator technologies with an increasing requirement for low cost microswitch arrays providing large air gap and large force at the same time. In particular, large air gap/large force microactuators a...