The objective of this paper is to design and fabricate a micro-cooler to provide integral cooling to electronics or Microelectromechanical Systems (MEMS) type components utilizing current MEMS technologies. A three-port capillary pumped loop (CPL) was analyzed and fabricated from silicon and quartz for this purpose. An analytical study of the device is presented in support of this design. This ...

This article summarizes the most recent technological developments in the realization of integrated aluminum nitride (AlN) piezoelectric microelectromechanical system (MEMS) for radio frequency (rf) front ends to be employed in next generation wireless communication devices. The AlN-based resonator and switch technologies are presented, their principle of operation explained, and some key exper...

We demonstrate strain-controlled gratings made of an organic elastomer, polydimethylsiloxane sPDMSd, which can achieve optical wavelength tuning by varying their spatial periods. The whole device structure presented in this work incorporates a nanoimprinted PDMS grating integrated with electrostatic microelectromechanical systems actuators on a silicon chip. The fabrication of the device combin...

We present a proof of concept (design, simulations, and experimental results) for an optical cross-connection device based on the optical White cell and a three-state microelectromechanical system tilting mirror array. We describe in detail the implementation of an underpopulated quartic White cell configuration. We discuss the aberrations associated with the output of the system.

The MIT Microsystems Technology Laboratories (MTL) is an interdepartmental laboratory whose mission is to foster research and education in semiconductor process and device technology and in integrated circuits and systems design. MTL provides microand nanofabrication and computer-aided design (CAD) infrastructure to the entire campus. MTL has 36 core faculty members who are engaged in diverse r...