The quartz crystal used in the reference oscillator in a wireless communication transceiver is among the most difficult to integrate on chip. On-chip devices capable of matching its Q (on the order of 10,000) and temperature stability (<35ppm over 0-70C) are generally unavailable. Recently, an on-chip vibrating clamped-clamped beam (CC-beam) micromechanical resonator based on MEMS technology ha...

We have measured the backaction of a dc superconducting quantum interference device (SQUID) position detector on an integrated 1 MHz flexural resonator. The frequency and quality factor of the micromechanical resonator can be tuned with bias current and applied magnetic flux. The backaction is caused by the Lorentz force due to the change in circulating current when the resonator displaces. The...

We experimentally demonstrate the high-sensitivity optical monitoring of a micromechanical resonator and its cooling by active control. Coating a low-loss mirror upon the resonator, we have built an optomechanical sensor based on a very high-finesse cavity (30 000). We have measured the thermal noise of the resonator with a quantum-limited sensitivity at the 10(-19) m/sqrt[Hz] level, and cooled...

Thumbnail-sized inertial measurement systems based on Micro Electro Mechanical Systems (MEMS) technology have been perceived as a breakthrough in the field of inertial navigation. However, even as micromechanical accelerometers have seen widespread commercialization, vibratory micromechanical gyroscopes have not enjoyed similar success. Previous approaches to high-performance micromechanical gy...

This paper presents a nonlinear analytical model for micromechanical silicon ring resonators with bulk-mode vibrations. A distributed element model has been developed to describe the dynamic behavior of the micromechanical ring resonator. This model shows the nonlinear effects in a silicon ring resonator focusing on the effect of large amplitudes around the resonance frequency, material and ele...

Because of their high surface over volume ratio, the mechanical behavior of micrometer sized structures differs from that of usual macroscopic objects. Their surface plays a key role, and this property has been proposed to devise micromechanical sensors of environmental changes [1]. In particular, a significant effort has been put on the development of biological sensors [2], thus highlighting ...

Third-order, micromechanical bandpass filters comprised of three folded-beam resonators coupled by flexural mode springs are demonstrated using an IC-compatible, polysilicon surface-micromachining technology. The use of quarter-wavelength coupling beams attached to resonators at their folding-trusses is shown to suppress passband distortion due to finite-mass nonidealities, which become increas...

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