نتایج جستجو برای: oxynitride thin films
تعداد نتایج: 181302 فیلتر نتایج به سال:
Amorphous silicon oxynitride (SiOxNy) thin films were grown by reactive high power impulse magnetron sputtering from a pure silicon target in Ar/N2O plasmas. The elemental composition of the films was shown to depend on the target surface conditions during the film deposition, as well as on the reactive gas flow rate. When the target was sputtered under poisoned surface conditions, the film com...
1 Department of Chemistry, School of Science, The University of Tokyo, 7-3-1 Hongo, Bunkyo, Tokyo 113-0033 Japan 2 Kanagawa Academy of Science and Technology (KAST), 3-2-1 Sakado, Takatsu, Kawasaki 213-0012 Japan 3 CREST, Japan Science and Technology Agency, 7-3-1 Hongo, Bunkyo, Tokyo 113-0033 Japan 4 Tandem Accelerator Complex, University of Tsukuba, 1-1-1 Tennodai, Tsukuba, 305-8577 5 Departm...
Abstract In order to determine the influence of process parameters including nitrogen and oxygen flow rate on structure electrical transport characteristics zirconium oxynitride(ZrO x N y ) thin films, ZrO films were prepared sapphire substrates by RF reactive magnetron sputtering deposition technology. The crystal orientation morphology at different characterized XRD SEM, respectively. electri...
Silicon nitride and silicon nitride-based ceramics have several favorable material properties, such as high hardness and good wear resistance, which makes them important materials for the coating industry. This thesis focuses the synthesis of silicon nitride, silicon oxynitride, and silicon carbonitride thin films by reactive magnetron sputtering. The films were characterized based on their che...
A plasma-assisted directed vapor deposition approach has been explored for the synthesis of lithium phosphorous oxynitride Lipon thin films. A Li3PO4 source was first evaporated using a high voltage electron beam and the resulting vapor entrained in a nitrogen-doped supersonic helium gas jet and deposited on a substrate at ambient temperature. This approach failed to incorporate significant con...
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