Production machines for next generation LSIs such as 4G-DRAMs and for large liquid crystal displays such as 0.5mx0.5m size, and information equipment such as magnetic hard disks and DVDs must have the positioning accuracy of a nano-meter order. To realize such a high degree of the positioning accuracy, not only precision machine elements and mechanisms but also high precision sensors, actuators...

GPS has been used in positioning and navigation for decades. However, there are still many unsolved problems existing, for instance the degradation of positioning precision when the view of sky is obstructed. Pseudolite, a ground-based GPS satellite-like signal transmitter, can provide extra measurements in order to improve the positioning precision from GPS alone in the obstructed areas. In th...

This article focuses on developing a novel trans-scale precision positioning stage based on the stick-slip effect. The stick-slip effect is introduced and the rigid kinematics model of the stick-slip driving is established. The forward and return displacement equations of each step of the stick-slip driving are deduced. The relationship of return displacement and the acceleration produced by fr...

This paper made analysis of present situation and development trend of the positioning in small range at first and then made summary about the technologies and algorithms of the positioning in small range. According to the above content, wireless location technology has broad application prospects, especially the applications related to the location in small range. This new wireless positioning...

A positioning system with long stroke and high precision by dualstage control was designed. The focus was on combining the long-stroke travel range of linear stage with high-precision characteristics of piezoelectric actuators. The control method used in the system was dynamic compensation type, where the error from linear stage becomes the input to the piezoelectric actuators. Positioning erro...

This paper presents the development of a contactless sensing system and dynamic evaluation an air-bearing-based precision wafer positioning system. The stage is response to trend seen in high-tech industry, where substrates are becoming thinner larger reduce cost increase yield. Using handling it possible avoid damage contamination. works by floating substrate on thin film air. A viscous tracti...