the scanning probe microscopes (spms) based lithographic techniques have been demonstrated as an extremely capable patterning tool. manipulating surfaces, creating atomic assembly, fabricating chemical patterns, imaging topography and characterizing various mechanical properties of materials in nanometer regime are enabled by this technique. in this paper, a qualified overview of diverse lithog...

This paper presents an al~or i f l i rn for recovering, in st lu, thc shapc of zhc probp used in FL Rcnnnlng prohe microscope. Thp inputs to the d g o r ~ l ~ l ~ n i are the imREP of A reference si~rlarc and the known shapc of 1 he rrCerence surIacr Thr o11tpi11 in n drpth map rrprewriting the lhrw ~ l i r n ~ n ~ i o n a l sh pr of ~11c prnhr 'I'his recovered pmbc shapc can ho uscd to rPstorP...